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584results about "Gas cushion bearings" patented technology

Stabilizing a substrate using a vacuum preload air bearing chuck

Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.
Owner:KLA TENCOR TECH CORP

Stabilizing a substrate using a vacuum preload air bearing chuck

Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.
Owner:KLA TENCOR TECH CORP

Compliant hybrid gas journal bearing using integral wire mesh dampers

A compliant hybrid gas journal bearing includes compliant hybrid bearing pads having a hydrostatic recess and a capillary restrictor for providing a flow of pressurized gas to the bearing. The bearing also includes an inner rim adjacent the bearing pads, an outer rim and a damper bridge between the inner and outer rims. The damper bridge has an axial length that is less than an axial length of the bearing pads and the outer rim to form a damper cavity on each side of the damper bridge. An integral wire mesh damper is situated within the damper cavity on each side of the damper bridge. Integral centering springs are located between the inner and outer rims to provide radial and rotational compliance to the bearing pads. The oil-free bearing design addresses the low damping and low load capacity characteristics that are inherent in present day compliant air foil bearing designs, while retaining the compliance to changes in rotor geometry.
Owner:GENERAL ELECTRIC CO

Spindle device and machine tool utilizing the same

A spindle device equipped with a combined externally pressurized gas-magnetic bearing assembly, and a machining apparatus utilizing the spindle device. The spindle device is capable of accomplishing a high speed rotation with high rotational precision and includes a main shaft (4) rotatably supported by the combined bearing assembly (6 to 9), an electric current detecting device (15 to 18) disposed in a spindle controller (3) for detecting a current supplied to electromagnets of the combined bearing assembly (6 to 9). Also provided is a machining status determining device (19) for determining the machining status in reference to the current detected by the current detecting device (15 to 18). The machining status may be an indication of the extent to which a machining tool is impaired.
Owner:NTN CORP

Journal bearing assemblies and methods of assembling same

A journal bearing assembly includes a bearing housing, a plurality of bearing pads, and a plurality of bearing pad support assemblies. The bearing housing includes a radial outer wall. The plurality of bearing pads are mounted within the bearing housing, and include at least one of a gas permeable porous media and an array of gas delivery holes. The plurality of bearing pad support assemblies are radially interposed between the bearing pads and the radial outer wall. Each of the bearing pad support assemblies includes a spring assembly and a damper assembly.
Owner:NUOVO PIGNONE TECH SRL

Combined externally pressurized gas-magnetic bearing assembly and spindle device utilizing the same

A combined externally pressurized gas and magnetic bearing assembly (3) includes an externally pressurized gas bearing (9) and a magnetic bearing (8) that are integrated together so as to have component parts common to both of the externally pressurized gas bearing (9) and the magnetic bearing (8). The externally pressurized gas bearing (9) or the magnetic bearing (8) may be disposed within an axial extent of the magnetic bearing (8) or the externally pressurized gas bearing (9), respectively. A spindle device (1) utilizing the combined externally pressurized gas and magnetic bearing assembly (3) is also provided which includes a housing (2) for supporting a main shaft (4) rotatably through the combined externally pressurized gas and magnetic bearing assembly (3). This combined externally pressurized gas and magnetic bearing assembly (3) can be applied not only to the radial bearing, but also to the axial bearing.
Owner:NTN CORP

Support Apparatus, Stage Apparatus, Exposure Apparatus, And Device Manufacturing Method

A support apparatus, a stage apparatus, an exposure apparatus, etc. are proposed that can increase response of a relative movement between a piston and a cylinder, etc. are proposed. There is provided a support apparatus including: a cylinder portion; a piston portion that is provided inside the cylinder portion and is movable in a Z direction; a fluid bearing formed in at least a portion between an inner wall of the cylinder portion and an outer wall of the piston portion, the support apparatus supporting a supported member in the Z direction with respect to a support member by means of a biasing force generated by the cylinder portion and the piston portion, in which fluids are supplied independently inside the fluid bearing and the cylinder.
Owner:NIKON CORP

Porous restrictor for gas bearing

A gas restrictor particularly usrful for applicatio in gas bearing as used, for example, in free-piston Striling cycle machinery. Porous strip material together with a backing plate and orifice (bleed hole) is used to provide the restriction to the flow of gas into an annular gap between a piston and a cylinder.
Owner:GLOBAL COOLING

Hermetically sealed damper assembly and methods of assembling same

A hermetically sealed damper assembly includes a sealed damper housing, a plunger, and a load transferring member coupled to the plunger. The sealed damper housing includes a body having a cavity and a resistive flow path defined therein. The cavity and resistive flow path are filled with a viscous fluid. The body includes a plurality of springs integrally formed therein. The plunger is disposed within the cavity, and separates the cavity into a first control volume and a second control volume. The resistive flow path provides fluid communication between the first and second control volumes. The plunger is coupled to the damper housing by the plurality of springs such that the springs provide a restorative force to the plunger. The load transferring member is configured to transmit mechanical loads to the plunger.
Owner:NUOVO PIGNONE TECH SRL

Active air-floatation support device

The invention discloses an active air-floatation support device which comprises an air-floatation support body, an air-film active adjustment unit, a support body detecting unit and a drive control unit, wherein the support body detecting unit measures the state of air-floatation support, the drive control unit generates a control signal according to a detection signal to drive and control the air-film active adjustment unit to generate an active role so as to dynamically adjust the air film form of an air-floatation support surface, thereby dynamically adjusting the pressure distribution of air film gaps of the air-floatation support device, and improving the dynamic stiffness characteristic of air-floatation support. According to the active air-floatation support device, the dynamic stiffness characteristic of air-floatation support can be significantly increased, and the purpose of stabilizing air-floatation support is achieved. In addition, the active air-floatation support device also has the characteristics of compact structure, convenience in control and high precision, thus being especially suitable for occasions of ultra-precision machining or with high-speed spindles with a high requirement on support dynamic stiffness.
Owner:HUAZHONG UNIV OF SCI & TECH

Air flotation type rotary table

The invention discloses an air floatation type rotary table which comprises an air floatation shaft and an air floatation sleeve. The air floatation shaft comprises a shaft portion, a top portion and a bottom portion, wherein the top portion and the bottom portion are arranged at the two opposite ends of the shaft portion respectively, the top portion comprises upper thrust surfaces which are opposite to the bottom portion, and the bottom portion comprises lower thrust surfaces which are opposite to the top portion. The air floatation sleeve comprises upper air flotation surfaces which are located on the top portion and lower air flotation surfaces which are located on the bottom portion, wherein the upper air flotation surfaces are in clearance fit with the upper thrust surfaces, the lower air flotation surfaces are in clearance fit with the lower thrust surfaces, and the inner surface of the air flotation sleeve is in clearance fit with the outer surface of the shaft portion. A plurality of air outlets which are connected with an external high-pressure air source are formed in the inner surfaces of the upper air flotation surfaces, the inner surfaces of the lower air flotation surfaces and the inner surface of the air flotation sleeve. According to the air floatation type rotary table, due to the fact that the two opposite upper air flotation surfaces and the two opposite lower air flotation surface are arranged on the air flotation sleeve, the axial static rigidity, rotation rigidity and axial rotation precision of the air flotation type rotary table are improved, a workpiece, to be detected, placed on the rotary table can be located at a stable height all the time, and the height where the workpiece is located is not changed along with the change of the air pressure.
Owner:GUANGZHOU HAOZHI ELECTROMECHANICAL

Movable body apparatus, exposure apparatus and optical system unit, and device manufacturing method

The upper end of a static gas bearing member of a wafer side seal unit is connected to an edge section on the outgoing side of an exposure beam of a chamber in an air tight state via bellows, and the lower end surface is in a state forming a predetermined clearance with a wafer and a wafer holder. By this arrangement, the inside of the chamber is isolated from the outside. Accordingly, it becomes possible to maintain a vacuum environment in the periphery of the optical path of the exposure beam without arranging a vacuum chamber to house a wafer, a wafer holder, and a wafer stage, which allows the size of the entire exposure apparatus to be reduced, and also makes it easy to have access to the vicinity of the wafer stage.
Owner:NIKON CORP

Compliant hybrid gas lubricated thrust bearing

Provided herein is a thrust bearing. The bearing includes one or more bearing pads, each with a thrust face, attached to a compliant bearing housing, a system for delivering a pressurized gas lubricant to the thrust face of the bearing pads, and a damping system that operates in parallel with the compliant bearing housing.
Owner:GENERAL ELECTRIC CO

Two-way dynamic-static pressure mixture lubrication thrust bearing

The invention relates to a two-way dynamic-static pressure mixture lubrication thrust bearing. Aiming to solve the problems of low accuracy and poor operating stability in an existing high-speed and heavy-load extreme working condition, the invention provides the two-way dynamic-static pressure mixture lubrication thrust bearing. The two-way dynamic-static mixture lubrication thrust bearing comprises a dynamic-static pressure oil pad, a circular machine tool base and a rotary workbench, wherein the rotary workbench is arranged right above the dynamic-static pressure oil pad; the circular machine tool base is arranged under the dynamic-static pressure oil pad; wedges are arranged on the dynamic-static pressure oil pad of the two-way dynamic-static pressure mixture lubrication thrust bearing and are arranged in two inner sides of the circumferential direction of an oil sealing edge. The two-way dynamic-static pressure mixture lubrication thrust bearing is applied to the field of high-speed and heavy-load machine tool workbenches.
Owner:HARBIN UNIV OF SCI & TECH

Air bearing for use as seal

In order to effect a seal; a porous material which comprises one side of two opposing surfaces is used to restrict and evenly distribute externally pressurized gas, liquid, steam, etc. between the two surfaces, exerting a force which is opposite the forces from pressure differences or springs trying to close the two faces together and so may create a non contact seal that is more stable and reliable than hydrodynamic seals currently in use.
Owner:NEW WAY MACHINE COMPONENTS

Ct scanner gantry with aerostatic bearing and segmented ring motor

Disclosed is a device having a rotor that is adapted to be rotated relative to a stator, with hydrostatic bearings being used as radial bearings and as axial bearings of the rotor. A motor is provided as a direct drive, having a ring-shaped part and also a plurality of motor segments which are in magnetic engagement with the ring-shaped part. In order to generate additional bearing load force, additional motor segments having permanent magnets are provided. For reasons of safety, axial support rolls are provided which, when the motor has attained a given bearing load force, are spaced from a running face of the rotor, and which, in a case of too low or an absence of load force, prevent a displacement of the rotor away from the axial bearings.
Owner:SCHLEIFRING & APPBAU

Rotating device

A rotating device includes a fixed body having a base and a shaft, a hub, and a rotating body having a rotating-body-side encircling member fixed to the hub and encircling the shaft. A lubricant is present between the fixed body and the rotating body. The rotating-body-side encircling member and the shaft are each formed with a radial dynamic pressure generating groove. The fixed body includes a base-side encircling member having a disk part encircling the base-side portion of the shaft and a cylinder part encircling the rotating-body-side encircling member. The base-side encircling member has the disk part fixed to the shaft by interference fitting, and has the cylinder part fixed to the base. An air-liquid interface is located in a gap in the radial direction between the inner periphery of the cylinder part and the outer periphery of the rotating-body-side encircling member.
Owner:SAMSUNG ELECTRO MECHANICS JAPAN ADVANCED TECHNOLOGY CO LTD

Air bearing, air floatation movement system, and method for stabilizing revolving shaft in air bearing

The invention discloses an air bearing. The air bearing comprises an air bearing body and a revolving shaft which is positioned in the air bearing body; the revolving shaft comprises a revolving shaft part which is cylindrical and a flange part which is formed vertically to an axial line where the revolving shaft is; the air bearing body is provided with a plurality of air guide holes; when the revolving shaft moves, air flowing through the air guide holes forms an air membrane between the revolving shaft and the air bearing body; and when the revolving shaft is static, the axial action force provided by the air flowing through the air guide holes ensures that the partial surface of the flange part is closely contacted with the air bearing body. In the air bearing, when the revolving shaft is static, the revolving shaft is closely contacted with the air bearing body by using air, so that the revolving shaft is in a very stable state. Then, a good effect can be achieved for observation operation or other processing operation.
Owner:MICROFOCUS TECH

Oil-free turbocharger bearing assembly having conical shaft supported on compliant gas bearings

This invention provides a turbocharger bearing assembly having foil bearing assemblies (21, 22, 23, 24, 30, 35, 36, 37, 40, 41, 42, 45, 46, 47, 50, 52) supporting conical rotor elements (3, 4, 10, 11, 16, 17, 31, 32).
Owner:BORGWARNER INC

Mixed type helical groove dynamical and static pressure gas composite thrust bearing

The "hybrid spiral groove dynamic and static pressure gas composite thrust bearing" of the present invention relates to a high-speed, high rigidity, large load ultra-precision spiral groove dynamic and static pressure gas composite thrust bearing. There are herringbone dynamic pressure grooves on both sides of the air point distribution circle. Without increasing the air consumption of the air bearing, the bearing capacity is more than 30% higher than that of the traditional static pressure air bearing, and the bearing stiffness is higher than that of the traditional static pressure air bearing. The bearing is improved by more than 15%.
Owner:HARBIN INST OF TECH

Elastic support foil hydrodynamic gas bearing with inherent structure pre-wedge space

The invention discloses an elastic support foil hydrodynamic gas bearing with inherent structure pre-wedge space. The elastic support foil hydrodynamic gas bearing comprises a bearing body and a rotary shaft located in the bearing body. An elastic support element is arranged on the inner side of the bearing body. Top-layer flat foil is arranged between the elastic support element and the rotary shaft. A smooth shaft segment is arranged on the axial middle area of the surface of the rotary shaft. The positions, located on the two sides of the smooth shaft segment, of the surface of the rotary shaft are each provided with a line of inclined grooves. The inner side of the top-layer flat foil surrounds and wraps the rotary shaft, a pre-clearance is formed between the top-layer flat foil and the rotary shaft, meanwhile, the elastic support element and one end of the top-layer flat foil are fixed to the same position of the bearing body, and the other end of the top-layer flat foil is free.The elastic support foil hydrodynamic gas bearing has the beneficial effects that a hydrodynamic gas film can be formed at the relatively-low rotating speed with small foil deformation, the rotary shaft and the bearing body are in contact uniformly in the start stage and the stop stage, the contact friction time between the rotary shaft and the bearing body is shortened, wear between the rotary shaft and the bearing body is reduced, and the operation stability and reliability of a system are improved.
Owner:XI AN JIAOTONG UNIV +1

Journal bearing assemblies and methods of assembling same

A journal bearing assembly includes a bearing housing, a plurality of bearing pads, and a plurality of bearing pad support assemblies. The bearing housing includes a radial outer wall. The plurality of bearing pads are mounted within the bearing housing, and include at least one of a gas permeable porous media and an array of gas delivery holes. The plurality of bearing pad support assemblies are radially interposed between the bearing pads and the radial outer wall. Each of the bearing pad support assemblies includes a spring assembly and a damper assembly.
Owner:NUOVO PIGNONE TECH SRL

Air bearing compatible with operation in a vacuum

Methods and apparatus for enabling the stroke length of a linear guide that is suitable for use in an environment with high vacuum levels to be substantially independent of a length associated with the linear guide are disclosed. According to one aspect of the present invention, a guide bearing system includes a linear guide and a first guide beam. The linear guide has an inner surface which includes an air pad. The linear guide is wrapped around the first guide beam such that it may slide with respect to the guide beam. The guide beam includes a first chamber that is in fluid communication with the linear guide through at least one of a first plurality of ports in the guide beam which enable access to the first chamber.
Owner:NIKON CORP

Slot aerodynamic journal bearing

The invention discloses a slot aerodynamic journal bearing which comprises a bearing outer race and a bearing inner race. Slot patterns with regular shapes are arranged on the external circumference surface and the two end surfaces of the bearing inner race; the slot patterns on the two end surfaces are in mirror symmetry; and an axial contour line of the slot pattern on the external circumference surface is in one-to-one correspondence and is connected with radial contour lines of the slot patterns on the two end surfaces. The slot aerodynamic journal bearing can achieve 1-3kg loading capacity and 200,000-450,000rpm limit speed and meet the application of the aerodynamic journal bearing in the ultrahigh speed field under a higher load.
Owner:罗立峰
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