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6725results about "Melt-holding vessels" patented technology

Substrate processing system, substrate processing method and storage medium storing program

A substrate processing system includes a controller that outputs a control signal for controlling a substrate processing apparatus; and a software interlock component that outputs an interlock signal if a predetermined interlock condition is satisfied. In the substrate processing apparatus, a multiple number of devices of the same kind are provided and each device is selected to be either an interlocked state or a non-interlocked state with other devices. The software interlock component outputs an interlock signal to any one of the multiple number of devices of the same kind if it is determined that the multiple number of devices satisfy the predetermined interlock condition. If any one of the multiple number of devices of the same kind receives the interlock signal, the multiple number of devices are interlocked according to an instruction of the interlock signal regardless of an interlocked state or a non-interlocked state of the devices.
Owner:TOKYO ELECTRON LTD
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