The invention relates to a surface high-frequency vibration conformal
machining device and method for an optical element. The method is based on parts such as a precision air cylinder, a gantry, a high-speed motor, a precision frequency converter, a
cam, a swinging arm, a
grinding head and a rotary platform, a
polishing grinding head provided with a base layer, a flexible layer and a
polishing layer is tightly attached to the surface of a workpiece with a certain pressure to carry out high-frequency vibration polishining. The high-frequency vibration conformal
polishing method adopts full-aperture conformal
coverage type polishing, is not limited by the surface characteristics of the workpiece to be machined, can polish various special-shaped optical surfaces, and achieves removal of high-speed materials on the surface of the workpiece to be machined, and the polishing efficiency is improved by 10-50 times compared with a
common method. Meanwhile, a smoothness function is achieved for
high frequency errors in the surface of the workpiece, and the surface high-frequency vibration conformal
machining device and method for the optical element adapts to rapid polishing and medium and
high frequency error suppression of small and
large aperture planar, spherical and aspheric elements in the
axial symmetry and special-shaped elements.