The invention discloses a super
lateral resolution surface three-dimensional online interference measuring
system based on a
spectral dispersion full field, and belongs to the field of optical measurement. The
system is composed of a
broadband light source, an
isolator, a
fiber, a
fiber joint, a spherical-surface and cylindrical-surface spectroscopes, spectroscopes, right-angle prisms, diaphragms, a raster, a reflector, a surface array
detector, a photoelectric
detector, a Fabry-Perot filter, piezoelectric ceramics, a
signal processing circuit, a
feedback control circuit, a
data acquisition card, a computer, translation benches, a translation bench driving part, a result output part and the like. The raster disperses a
broadband spectrum to form a
mating plate whose
wavelength is continuously distributed in a transverse direction, and the
mating plat is incident vertically to a measured surface through beam expansion for full-field measurement; a surface provided with a step whose
height difference is greater than a half-
wavelength and a large-depth-to-width-ratio groove is measured by use of two wavelengths; super
lateral resolution measurement is realized by use of the Fabry-Perot filter; and ambient interference is compensated through
feedback control, the
system is enabled to be suitable for online measurement, the measuring result can be accurately traced to a
wavelength reference, and the influence of the drift of a
light source spectrum is eliminated.