The invention discloses a
wafer loading box unlocking and door opening
system for a
wafer loader, which comprises a rack of the
wafer loader, an interface is arranged on the rack, a door opening device is arranged, the door opening device comprises a pick-and-place
assembly, an unlocking
assembly and a connecting plate, the pick-and-place
assembly is fixedly connected with the connecting plate, the connecting plate is arranged corresponding to the interface, and the unlocking assembly is arranged on the rack. Meanwhile, the cross-connecting plate is in
butt joint with the sealing door of the wafer loading box, the unlocking assembly is arranged on the cross-connecting plate, the sealing door of the wafer loading box and the box body are unlocked through the unlocking assembly, and the taking and placing assembly drives the cross-connecting plate and the cross-connecting port to be opened and closed, so that the sealing door of the wafer loading box is taken and placed through the cross-connecting port. Through combination of the pick-and-place assembly and the unlocking assembly, the motion
route of the door opening device is limited, the degree of freedom of motion is reduced, functions needing to be completed by three driving parts are reduced into two functions, the space structure is simplified, control is easy, the reliability of wafer loading action is improved, and
modular design of the sealing door pick-and-place mechanism of the wafer loading box is achieved.