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Method for making mini optical fibre spectrometer narrow slit

A fiber optic spectrometer and a manufacturing method technology, which are applied in the fields of spectrum investigation, microstructure technology, microstructure device, etc., can solve the problems of inapplicability to micro-miniature fiber optic spectrometers, poor interface versatility, mechanical slits, multiple diffractions and low resolution, etc. , to achieve the effect of eliminating secondary diffraction, firm fixation, and simple spatial structure

Inactive Publication Date: 2008-12-24
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0008] In order to solve the problems of secondary diffraction, multiple diffraction and low resolution, complex spatial structure, complex processing and assembly, poor shock resistance, poor interface versatility, and mechanical slits that cannot be applied to micro-fiber spectrometers in the micro-fiber spectrometer in the background technology, etc. , the object of the present invention will provide a kind of miniature optical fiber spectrometer based on classic Czerny-Turner structure and its manufacturing method

Method used

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  • Method for making mini optical fibre spectrometer narrow slit
  • Method for making mini optical fibre spectrometer narrow slit
  • Method for making mini optical fibre spectrometer narrow slit

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Embodiment Construction

[0026] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the present invention is not limited to these embodiments. The present invention miniature optical fiber spectrometer support and related components are as accompanying drawing 1, Fig. 2, image 3 , Figure 4 , Figure 5 , Image 6 As shown, it includes installation slot 1, bracket 2, first threaded hole 3, first slot 4, second slot 5, aperture 6, third slot 7, fourth slot 8, stepped surface 9, entrance 10, second slot Screw hole 11, third screw hole 12, outlet 13, gland 14, imaging mirror 15, collimating mirror 16, grating 17, slit 23.

[0027] The bracket 2 is made of metal material and is made by high-precision wire cutting. The width and depth of the installation groove 1, the first groove 4, the second groove 5, the third groove 7 and the fourth groove 8 on the support 2 body can be determined according to the mounting surface of the optical e...

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Abstract

The invention relates to a manufacturing method for a microminiaturized optical spectrograph slit. Firstly, a slit billet is subjected to oxidization, adhesive coating and photoetching to form a pattern with scallops, the pattern with the scallops undergoes corrosion, adhesive removal, adhesive coating and photosetching to form a slit hole pattern, the silt hole pattern is subjected to ICP etching or wet corrosion to form a slit billet of an impervious groove, and then the slit billet of the impervious groove is subjected to the adhesive removal, the ICP etching or the wet corrosion to obtain the scallops and a slit hole. The slit with small volume and low price is prepared by a micro-machined technology, so a microminiaturized optical spectrograph has the advantages of compact structure, small volume and the reduction of manufacturing cost, and is easier for integration.

Description

[0001] This application is a divisional application of the following application. [0002] Original application filing date: 2005.4.27 [0003] Original application number: 200510016752.8 [0004] Title of original application: The structure of a miniature optical fiber spectrometer and its slit manufacturing method Technical field: [0005] The invention belongs to the field of micro-opto-mechanical systems, and relates to the structure of a miniature optical fiber spectrometer and its slit manufacturing method. Background technique: [0006] Spectrometer is one of the important components of optical instruments. It is a basic equipment that can measure and analyze the structure and composition of substances. It has the advantages of high analysis accuracy, large measurement range, and fast response. It is widely used in medicine, chemistry, and geology. , physics and astronomy research. Modern spectrometer technology began with industrial applications during World War I...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00G01J3/28
Inventor 吴一辉贾宏光周连群张平鞠挥宣明
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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