Disclosed are a heat-resistant resin laminate film comprising a heat-resistant insulating film such as a
polyimide film and a heat-resistant resin layer laminated thereon, which laminate film is free from warp; and a laminate film with a
metal layer, comprising a heat-resistant insulating film and a
metal layer laminated thereon through a heat-resistant resin layer, which laminate film with a
metal layer is free from warp in the state that a circuit pattern is formed. In the heat-resistant resin laminate film, a heat-resistant resin layer is laminated on at least one surface of the heat-resistant insulating film, wherein the heat-resistant resin layer has a coefficient of linear expansion kA (ppm / ° C.) within the range of k−10≦kA≦k+20 (k: coefficient of linear expansion of the heat-resistant insulating film). The laminate film with a metal layer is one obtained by laminating the metal layer on the heat-resistant resin layer of the heat-resistant resin laminate film.