The invention discloses a micro
electromagnetic vibration energy harvester based on patterned permanent
magnet full integration, and belongs to the technical field of micro electromechanical systems. The micro
electromagnetic vibration energy harvester comprises an insulating substrate, a plane spiral
induction coil, an insulating material
coating layer, a vibration
pickup structure, a patterned permanent
magnet, support structures and lead electrodes, wherein the insulating substrate, the plane spiral
induction coil, the insulating material
coating layer, the vibration
pickup structure and the patterned permanent
magnet are sequentially fixed upwards from the bottom; the support structures are fixedly connected with the insulating substrate; and the vibration
pickup structure is suspended above the insulating material
coating layer. In external vibration, the permanent magnet fixed together with the vibration pickup structure changes a
magnetic flux in the
induction coil by inertial movement, thereby generating induction
voltage. The permanent magnet is integrated and manufactured by utilizing a
micro structure patterning method, and moreover, the patterned permanent magnet has a relatively thicker
micro structure, so that the patterned permanent magnet has energy acquisition and conversion efficiency which is higher than that of an electroplated permanent magnet, and is compatible to an
integrated circuit (IC) process and easy to
machine in batches.