The invention provides automatic
silicon wafer sorting equipment. The equipment comprises a feeding part, a detecting part and a discharging part which are sequentially arranged; the detecting part comprises a transmission mechanism, a positioning mechanism, surface detecting modules, a geometric parameter detecting module and a resistivity detecting module, wherein the transmission mechanism is arranged in the detecting part and used for transmitting
silicon wafers; the positioning mechanism is arranged at the starting end of the transmission mechanism, and is used for positioning dischargedsilicon wafers from
wafer discharging baskets; the surface detecting modules are arranged on the side surface and the upper surface of the transmission mechanism and used for detecting the appearancedefects of the surface of the
silicon wafer; the geometric parameter detecting module is arranged in the detecting part and used for measuring the thickness of the silicon wafer; and the resistivity detecting module is arranged in the detecting part and used for measuring the electric loss of the silicon wafer. The equipment has the beneficial effects that a belt
transmission line, the appearancedetecting, the geometrical parameter detecting, the resistivity detecting, the
laser marking and other functions are integrated, so that automatic, efficient and accurate sorting of the silicon waferis realized, the capacity of silicon wafer detecting sorting is effectively improved, the silicon wafer is guaranteed to be sorted freely according to resistivity, thickness, appearance and other parameters, and the false detecting rate can be reduced.