39 results about "Segmented mirror" patented technology

MEMS hierarchically-dimensioned optical mirrors, each comprising a substrate, a plurality of spacers disposed on the substrate, a plurality of piezoelectric / electrostrictive cantilever microactuators disposed on the plurality of spacers, and a monolithic deformable mirror or a segmented mirror array disposed on the plurality of the cantilever assemblies, having significantly improved overall device performances owing to the use of the cantilever microactuators based on relaxor ferroelectric single crystal materials and / or other piezoelectric / electrostrictive materials, are disclosed along with methods of manufacturing such devices.

A MEMS device having a movable plate supported on a substrate by a support structure that is hidden under the plate and yet which can be implemented to enable rotation of the plate with respect to the substrate about a rotation axis lying at the plate surface. As a result, the support structure does not take up any area within the plane of the plate, while enabling rotation of the plate, during which the plate does not substantially move sideways. The latter property reduces potential physical interference between neighboring plates in an arrayed MEMS device and enables implementation of a segmented mirror having relatively narrow gaps between adjacent segments and, thus, a relatively large fill factor, e.g., at least 98%.

An apparatus for inspecting a photomask, comprising an illumination source for generating a light which illuminates a target substrate, objective optics for receiving and projecting the light which is reflected from the target substrate, the objective optics includes a first mirror arranged to receive and reflect the light which is reflected from the target substrate, a second mirror which is arranged to receive and reflect the light which is reflected by the first mirror, a third mirror which is arranged to receive and reflect the light which is reflected by the second mirror, and a segmented mirror which is arranged to receive and reflect the light which is reflected by the third mirror. The segmented mirror includes at least two mirror segments. The apparatus further includes at least one sensor for detecting the light which is projected by the objective optics.

The invention provides a precision micrometric displacement actuator used under a polar region low-temperature environment, and relates to the precision micrometric displacement actuator. The precision micrometric displacement actuator solves the problem a supporting and adjusting mechanism suitable for a large-scale segmented mirror telescope under the polar region low-temperature environment does not exist at present. A base plate is mounted in a shell, a rolling linear guide rail is mounted on the base plate, and a left end cap and a right end cap are arranged at the two ends of the shell in a covering mode respectively. A flexible shaft is mounted on a driving rod, a motor seat is mounted on the rolling linear guide rail, and a stepping motor is mounted on the motor seat. One end of a screw rod is connected with the stepping motor through an elastic coupler, a base is mounted on the base plate, and a sleeve is mounted in the base. A first nut is mounted at the left end of the driving rod, a second nut is mounted at the right end of the sleeve, and the other end of the screw rod is screwed on the second nut and the first nut. One end of the driving rod is inserted into the sleeve and is connected with the first nut, and the other end of the screw rod is connected with the flexible shaft. A shaft sleeve is arranged on the driving rod in a sleeved mode, and a pre-tightening spring is arranged on the driving rod in a sleeved mode and is compressed between the first nut and the shaft sleeve. The precision micrometric displacement actuator is used in the segmented mirror telescope.

An apparatus having a plurality of arrayed MEMS devices, each device having a parallel-plate actuator and a reflective plate, both of which are mechanically coupled to a flexible beam attached between two anchors. Advantageously, the use of parallel-plate actuators in the apparatus alleviates stringent requirements for the alignment of lithographic masks employed in the fabrication process. In one embodiment, each flexible beam has a relatively small thickness and a relatively large length to effect a relatively large displacement range for the corresponding reflective plate. Movable electrodes of different parallel-plate actuators are configured to act as an electrical shield for the flexible beams, which reduces inter-device crosstalk in the apparatus. Reflective plates of different MEMS devices form a segmented mirror, which is suitable for adaptive-optics and / or maskless lithography applications.

Image projectors with increased light intensity and methods for providing brighter images are provided. Image projectors, described herein, can provide the brightness while still providing any or all of compactness, low power consumption, and long lifetime. To increase brightness, sectional mirrors are used to respectively compress the light from two light sources into a single pupil (e.g. an aperture) of an imaging device. The compression can be accomplished by regions (e.g. sections) of the mirror having different angles with respect to the pupil. Relatively little light may be lost in the compression since minima for a light intensity pattern from a light source may occur between the regions that reflect the light.

The invention discloses an edge sensor for a segmented mirror surface based on an interference principle, and a working method thereof. The edge sensor is characterized in that: an optical flat or spherical lens is placed on a sub-mirror splicing seam of a measured segmented mirror surface, the front surface of the optical flat or spherical lens is completely anti-reflection, and the rear surfaceof the optical flat or spherical lens is provided with a coating film; a parallel light source is arranged on the other side of a sub-mirror of the measured segmented mirror surface and the optical flat or spherical lens, light rays vertically enter the optical flat or spherical lens by means of a semi-reflecting and semi-transmitting prism and then part of the light beam on the surface returns, the other part is reflected by the surface of the sub-mirror along an original path, the two beams of reflected light form interference fringes, the interference fringes enter a microscopic amplification imaging system by means of the semi-reflecting and semi-transmitting prism, and target surface receiving and digital imaging are carried out by means of a CCD or CMOS detector, namely, the splicingerror of the adjacent sub-mirrors can be handled. The edge sensor prevents starlight and wavefront sensors from occupying and wasting a limited high-imaging-quality field of view of an optical system, is low in price, stable in performance and not affected by environmental factors, and is suitable for detecting the splicing errors between the adjacent sub-mirrors of various optical segmented mirror surfaces.

Systems are described that disperse the wavelength bands corresponding to the channel centers at a faster rate than the bandwidth of the channels themselves. An embodiment consists of a double element system including a grating, to create the initial separation, and a segmented mirror with multiple flat facets of different tilt, which reflect each spatially separated channel at a different angle. The size, position and angle of the facets are designed to match the spacing and position of individual channels of known wavelength and number that are diffracting from a grating with a predefined period, a set distance from this device. This system enables the individual channels to be re-imaged at some later point with a large separation between the channels, relative to their spatial size.

Two pulse sequences are delivered by two lasers. A rotating segmented mirror having one or more reflective areas and one or more transmissive areas is rotated synchronously with the delivery of the pulse sequences to transmit pulses from one sequence, and to reflect pulses from the other sequence at intervals.

A lithography apparatus is disclosed, which comprises a mirror having at least two mirror segments which are joined together in such a way that an interspace is formed between the mirror segments, and a sensor for detecting the relative position of the mirror segments, wherein the sensor is arranged in the interspace between the mirror segments.

The present invention relates to a novel land based reflecting telescope having a stationary, equatorially mounted, segmented mirror comprised of a plurality of movable mirrored collectors. These movable collectors are arranged in hexagonal groups to form a multiple mirrored reflector, which comprises the stationary compound telescope. A secondary mirror mounted atop a tower at the focal point directs the image toward the observation cart. Observers ride the periphery of the stationary mirror at a rate of one revolution per day. A retractable air supported hypalon cover protects the large primary mirror structure.

In a reflecting mirror, a plurality of segmented mirrors are grouped into a plurality of groups of a cluster, and are supported by a plurality of sub mirror cells. The plurality of sub mirror cells are supported by a mirror cell, and all the segmented mirrors are supported by the mirror cell. A reference cell is supported by a plurality of force support mechanisms disposed in the mirror cell with the reference cell being nearly in a weightlessness state. Projections and depressions are prevented from occurring in an axial direction of the reflecting mirror due to a self weight deformation, and the reference cell can be used as a reference surface for control of the positions of the plurality of segmented mirrors and those of the plurality of cluster mirrors in the axial direction of the reflecting mirror.