Adjacent segmented mirror detection method and detection system
A detection method and imaging system technology, applied in the field of optics, can solve problems such as difficult splicing and alignment of splicing mirrors, and achieve the effects of convenient disassembly and maintenance, easy operation, and high precision
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Embodiment 1
[0046] According to an embodiment of the present invention, a method for detecting adjacent spliced mirrors is provided, which is suitable for confocal / co-phase spliced mirrors, see figure 1 , including the following steps:
[0047] S101: Divide the coherent light source into two parallel beams with a preset optical path difference;
[0048] S102: two beams of parallel light beams are respectively incident on two adjacent splicing mirrors for reflection;
[0049] S104: Folding and crossing the reflected two beams of parallel beams, and interfering the two beams after the deflection and crossing to generate interference fringes;
[0050] S106: Deduce the parameter information between two adjacent splicing mirrors from the interference fringe information.
[0051]In the method for detecting adjacent splicing mirrors in the embodiment of the present invention, the parameter information between two adjacent splicing mirrors is calculated from the interference fringe informat...
Embodiment 2
[0062] According to another embodiment of the present invention, see Figure 4 , provides an adjacent stitching mirror detection system, comprising:
[0063] Laser 1, used to generate a coherent light source;
[0064] The beam splitter is used to split the coherent light source into two parallel beams with a preset optical path difference and incident them on two adjacent splicing mirrors for reflection;
[0065] The beam interferometer is used to fold and cross the reflected two beams of parallel beams, and interfere the two beams of folded and crossed beams to generate interference fringes;
[0066] The parameter calculation unit is used to calculate the parameter information between two adjacent splicing mirrors from the interference fringe information.
[0067] As a preferred technical solution, the beam splitter includes: a right-angled triangular prism 3, a parallelogram prism 5, the right-angled triangular prism 3 is glued to the parallelogram prism 5 whose angle is c...
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