The invention relates to a
laser micromachining process and in particular relates to a
laser-
water jet composite micromachining process and device. The composite micromachining process comprises the following steps of: positioning
water jet at the back of a
laser beam, leaning the
water jet, and simultaneously acting the water jet on the surface of a material, wherein the parameter of a water jet
offset distance is as follows: the water jet
offset distance, namely the range of the distance between a laser beam action point and post-positioned water jet
erosion point, is 0.4-0.8mm; the focal plane position (fpp) parameter of the laser beam is minus 0.6mm-0mm; the
energy parameter of laser pulse is 0.3mJ-0.6mJ; the
overlap coefficient of mobile laser pulse is 99.3%-99.9%; and the pressure of water jet is 5MPa-20Mpa, and the
erosion angle of the water jet is 30-60 degrees. The device provided by the invention is composed of a base body consisting of a horizontal guide rail and a vertical guide rail, a horizontal
slide plate, a vertical
slide plate, a rotary adjusting support, a water jet unit and a
laser cutting unit. According to the invention, the
laser heating and
softening temperature is far less than the melting or gasifying temperature, the heat influence on a material
machining zone is reduced, and high-efficiency, stable and near-nondestructive precise
machining is realized.