The invention provides a micro spherical type short coherent point
diffraction interference measurement
system and method and belongs to the micro spherical type detection technical field. The micro spherical type short coherent point
diffraction interference measurement
system and method aims at solving the problems that the
contrast ratio of the interference field of the existing short coherent point
diffraction interference measurement method is poor and accordingly the measurement accuracy is affected. The micro spherical type short coherent point diffraction interference measurement
system comprises a short coherent
laser, a first half
lambda wave plate, a rectangular reflecting mirror, a polarization splitting
prism, a first
pyramid prism, a first
plane mirror, a second
pyramid prism, a PZT (Piezoelectric
Ceramic Transducer) phase shifter, a
delay platform, a second half
lambda wave plate, an
optical fiber coupling mirror, a single-mode polarization-maintaining
optical fiber, a convergent lens, a pinhole lens, a first collimating lens, a quarter
lambda wave plate, a micro-objective, a second
plane mirror, a second collimating lens, a polaroid, an area array CCD (
Charge Coupled Device) and a computer. According to the micro spherical type short coherent point diffraction interference measurement method, an
optical path structure that the quarter lambda wave plate is combined with the polaroid is adopted to select beams in the interference field and accordingly
direct current components in the beams are reduced, the
contrast ratio of interference fringes is improved, and the adjustable optimization of the
contrast ratio is implemented. The micro spherical type short coherent point diffraction interference measurement system and method is applied to the micro spherical type detection.