Microsphere type short coherent point diffraction interferometry system and measurement method

Abstract

The invention provides a micro spherical type short coherent point diffraction interference measurement system and method and belongs to the micro spherical type detection technical field. The micro spherical type short coherent point diffraction interference measurement system and method aims at solving the problems that the contrast ratio of the interference field of the existing short coherent point diffraction interference measurement method is poor and accordingly the measurement accuracy is affected. The micro spherical type short coherent point diffraction interference measurement system comprises a short coherent laser, a first half lambda wave plate, a rectangular reflecting mirror, a polarization splitting prism, a first pyramid prism, a first plane mirror, a second pyramid prism, a PZT (Piezoelectric Ceramic Transducer) phase shifter, a delay platform, a second half lambda wave plate, an optical fiber coupling mirror, a single-mode polarization-maintaining optical fiber, a convergent lens, a pinhole lens, a first collimating lens, a quarter lambda wave plate, a micro-objective, a second plane mirror, a second collimating lens, a polaroid, an area array CCD (Charge Coupled Device) and a computer. According to the micro spherical type short coherent point diffraction interference measurement method, an optical path structure that the quarter lambda wave plate is combined with the polaroid is adopted to select beams in the interference field and accordingly direct current components in the beams are reduced, the contrast ratio of interference fringes is improved, and the adjustable optimization of the contrast ratio is implemented. The micro spherical type short coherent point diffraction interference measurement system and method is applied to the micro spherical type detection.

Description

technical field [0001] The invention relates to a microspherical short coherence point diffraction interferometry system and a measurement method, belonging to the technical field of microspherical detection. Background technique [0002] As one of the most commonly used components, microspheres are used in many fields such as aerospace, military, industry, and medical treatment. The surface accuracy of microspheres has a crucial impact on their performance. [0003] Although the methods such as atomic force microscope and confocal microscope used in traditional technology to detect microspheres have high longitudinal measurement accuracy, their single measurement range is very small, and they need to cooperate with high-precision mechanical scanning motion devices to realize the overall three-dimensional shape. This method is seriously affected by mechanical motion errors, and has problems such as low detection efficiency, poor lateral resolution, and easy omission of isola...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the problem that the contrast of the interference field is poor in the existing short-coherence phase-shifting point diffraction interferometry method, which affects the measurement accuracy, and provides a micro-spherical short-coherence point diffraction interferometry system and measurement method

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