The invention discloses a six-freedom-degree precision positioning table for a nano-imprint lithography system, wherein a spatial flexibility mechanism comprises a pre-tightening mechanism, three first displacement sensor and three first piezoelectric ceramic drivers, the pre-tightening mechanism comprises an elastic pre-tightening ring connected with a rigid ring, a base, a vertical column, three bottom elastic hinges and a first displacement sensor, the piezoelectric ceramic drivers are pushed on the elastic hinges; a plane flexibility mechanism comprises a rigid ring, a rigid supporting table, three flexible branched chains and three second piezoelectric ceramic drivers, each flexible branched chain comprises three top part elastic gemels, three second elastic gemels are connected by a driving connecting rod and a middle connecting rod, two second elastic gemels are respectively connected with the rigid ring and the rigid supporting table, the second piezoelectric ceramic drivers are pushed against on the driving connecting rod, three pairs of the supports are arranged, and each pair of the supports are connected with a second displacement sensor, and the rigid supporting table is connected with a movable platform; the working table has high resolution ratio and rapid dynamic response speed.