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Two-degree-of-freedom vibration isolating and precision positioning combined active vibration isolator

A precision positioning and active vibration isolation technology, which is applied in gas shock absorbers, vibration suppression adjustment, non-rotational vibration suppression, etc., can solve problems such as inability to achieve precise positioning and not forming a closed loop position loop

Active Publication Date: 2017-01-11
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

However, the high-speed and high-precision macro-micro platform based on piezoelectric ceramics disclosed in this patent document does not form a closed-loop position loop and cannot achieve precise positioning.

Method used

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  • Two-degree-of-freedom vibration isolating and precision positioning combined active vibration isolator

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Embodiment Construction

[0037] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0038] Figure 1~6 It is a schematic structural diagram of a two-degree-of-freedom vibration isolation and precise positioning composite active vibration isolator provided by the present invention. Such as Figure 1~6 As shown, the vibration isolator includes a base platform 10, a load platform 30, a first voice coil motor 25a, a first speed sensor 24a, a first displacement sensor 27a, and two...

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Abstract

The invention discloses a two-degree-of-freedom vibration isolating and precision positioning combined active vibration isolator. The vibration isolator comprises a basic platform (10) and a load-bearing platform (30), and is characterized in that the vibration isolator further comprises two vibration isolating units and a positioning unit; the vibration isolating units are arranged between the basic platform (10) and the load-bearing platform (30) and each comprise an air spring (2) and a first voice coil motor (25a) which are arranged in the first direction, and a stiffness-adjustable leaf spring and a second voice coil motor (25b) which are arranged in the second direction; and the positioning unit is arranged at the outer side of the vibration isolating units, comprises a proportional pressure valve (26) arranged in the first direction, and further comprises a second voice coil motor (25b) which is arranged in the second direction. According to the vibration isolator, through the two vibration isolating units and the precision positioning unit, precision vibration isolating and precision positioning are achieved, and the vibration isolator is suitable for ultraprecision machining and measuring equipment in microenvironments.

Description

technical field [0001] The invention belongs to the field of ultra-vibration isolation and precise positioning, in particular to a composite active vibration isolator for two-degree-of-freedom vibration isolation and precise positioning. Background technique [0002] At present, in the field of high-end IC chip manufacturing and ultra-precision detection, the requirements for environmental micro-vibration isolation and precise positioning are becoming more and more stringent. The general ultra-precision shock absorber often only has the function of precision vibration isolation, and some high-end micro-motion platforms only have the function of precise positioning. Due to the need for vibration reduction, the positioning accuracy of some micro-motion platforms has been greatly attenuated, so some new technologies and methods are urgently needed to improve this situation. Some methods such as hydraulic cylinder + metal spring, piezoelectric actuator + spring diaphragm, voice...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16F9/05F16F3/04F16F15/027F16F15/02F16F15/067
CPCF16F3/04F16F9/05F16F15/02F16F15/0275F16F15/067F16F2228/066
Inventor 陈学东王敏陶业英李小清
Owner HUAZHONG UNIV OF SCI & TECH
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