The invention provides a micro machinery
magnetic field sensor and a preparation method thereof, which belong to the field of a micro electro
mechanical system. A sacrifice layer with a
contact hole is deposited on a structural layer of a device, a
metal coil is prepared on the sacrifice layer, then the sacrifice layer is corroded, and finally
dry etching is used to manufacture a device structure, and the device structure is released to form a
resonance oscillator so as to form the
metal coil to hang on the micro machinery
magnetic field sensor above the
resonance oscillator. The
resonance oscillator of the micro machinery
magnetic field sensor works in an extension module, so that induced
electromotive force produced by each small section of
metal cutting magnetic induction lines on the metal coil can be overlapped, strength of output signals is strengthened, and contact surface between the metal coil and the resonance oscillator is reduced to solve the problem of
signal crosstalk in
high frequency. In addition, the micro machinery magnetic field sensor has the advantages of being low in
power consumption, simple in driving-detection circuit, small in temperature influence, simple in process and the like.