The present invention provides a method and a
system for a real-time configurable definition and generation of
grating profile libraries. A parameter set is used to specify the ranges of
grating dimensions and resolutions of the profile
library to be generated. In one embodiment, a
compiler creates subsets of a large profile
library, the subset designed to enable rapid search and validation of real-
time data. In another embodiment, an automatic process generates a new parameter set and a new subset of the
library when trigger conditions are met. Subsets of the profile library may be used to check if
grating spectrum data are within the ranges established for an application and if the dimensions are within the process averages established for a manufacturing run. The
system for generation of grating profile libraries is scalable, operable in a distributed environment, and includes
application specific items that can be selected or determined by the
client.