Aspects of the invention are directed to a device and a method for arranging / removing and aligning masks on substrates to be coated, especially for the micro-structuring of organic, electroluminescent materials (
OLED) on preferably large-surface substrates, especially screens, displays and the like. In one version a process includes providing a substrate on a substrate carrier, the substrate carrier having magnets arranged peripherally around a substrate
receiver area, holding the
mask using electromagnets on a holding
assembly moveable in several dimensions by a first movement device, determining relative positions of the
mask and substrate to each other, aligning the substrate and
mask with each other by actuating the first movement device such that the mask is moved relative to the substrate, if a
misorientation has been determined, depositing the mask on the substrate by moving at least one of the holding
assembly and the substrate carrier, and deactivating the electromagnets and holding the mask on the substrate by the magnets of the substrate carrier.