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38results about How to "High precision inspection" patented technology

Chip check apparatus

To provide a wafer inspection device which can realize an efficient configuration for suppressing an increase in footprint and can inspect a wafer with high accuracy.The wafer inspection device has a cassette part 2 and a wafer inspection part 3 including a microscope 6 and an XY stage 7 for moving the wafer 10. The cassette part 2 comprises a cassette 4 for holding the wafer 10 and an elevator 5. The wafer inspection part 3 comprises a carrying arm 18 that is arranged on the XY stage 7 to insert / extract the wafer 10 by arm pieces 181, 182 which can linearly move toward an opening of the cassette 4 and can be inserted between wafers 10 in the cassette 4, and a wafer rotary mounting base 22 which is vertically movable above the XY stage 7 to carry-in / carry-out the wafer to the carrying arm 18 by the vertical movement, a centering means for making the center of the wafer 10 and the rotary center of the wafer rotary mounting base 22 coincide with each other, and a detecting means for detecting the orientation of the wafer. (C)2004,JPO.
Owner:OLYMPUS CORP

Glass substrate defect inspection device and glass substrate defect inspection method

A glass substrate defect inspecting device and an inspection method thereof are provided to reduce or remove bouncing phenomenon and steadily perform an inspection by reducing the corrected amount during the inspection. A glass substrate (100) comprises a lifting device, a transfer device, and an optical inspection device. The lifting device lifts up a glass substrate(P) using air. The transfer device transfers the glass substrate to an inspection area where the lifting device is absent. The optical inspection device takes a picture of the glass substrate, thereby performing an inspection. A glass substrate defect inspecting device comprises a reduction device. The reduction device reduces the displacement caused by the bouncing of an end part of the glass substrate toward a transferring direction.
Owner:HITACHI HIGH-TECH CORP

Evaluation apparatus and probe position inspection method

An evaluation apparatus comprising: a supporting unit configured to fix a semiconductor device in place and cause an upper surface and a lower surface of the semiconductor device to be exposed; a first insulating plate provided above the supporting unit; a second insulating plate provided below the supporting unit; a plurality of first probes fixed to the first insulating plate; a plurality of second probes fixed to the second insulating plate; and a probe position inspection apparatus attached to the supporting unit, wherein the probe position inspection apparatus comprises: a casing including a first transparent member on a side of the first insulating plate and a second transparent member on a side of the second insulating plate; an internal prism provided in the casing; a prism rotating unit for rotating the internal prism in the casing; and an imaging unit provided outside the casing to take an image of any of the plurality of first probes contacting the first transparent member and the plurality of second probes contacting the second transparent member through the internal prism.
Owner:MITSUBISHI ELECTRIC CORP

Quality control method for solder joint portion and quality control device

The invention provides a quality control method for solder a joint portion, enabling highly accurate quality inspection in a non-damaged manner at a real time bases without an extra inspection process. The quality control method for a joint portion formed when solder and partial heat energy are supplied to a resin substrate, includes measuring temperature of the joint portion varying with time during jointing process, calculating a plurality of characteristic values based on the measured values, obtaining a single value index based on the plurality of characteristic values, and determining whether the joint portion is qualified or not by comparing the value index with the predetermined threshold, wherein the characteristic values includes time t1 indicating the time when the temperature of the joint portion is higher or equal to the predetermined time T1 which satisfied the conditions of (substrate vitrification temperature- 50 DEG C) <= T1<= (substrate vitrification temperature+250 DEG C), and time t2 indicating the time from utilizing heat energy to the temperature of the joint portion reaching the predetermined time T2 which satisfied the conditions of (substrate vitrification temperature-50 DEG C) <= T2<= (substrate vitrification temperature+250 DEG C).
Owner:MITSUBISHI ELECTRIC CORP

Inspection device

The purpose of the present invention is to provide an inspection device which, irrespective of the passing position of an inspection target, does not have a dead zone, does not have a change in polarity of a detection signal waveform, and can consecutively perform inspection. The inspection device (100) is provided with: a transport path (101) in which the inspection target is transported at a moving velocity v; a first magnetic detector (111) and a second magnetic detector (112) which detect the magnetism of magnetic foreign matter included in the inspection target (10); an amplifying unit (120) which amplifies each of detection signals from the first magnetic detector (111) and the second magnetic detector (112); and a calculation processing unit (130) which multiplies a signal, obtainedby delaying the detection signal from the first magnetic detector (111), by the detection signal from the second magnetic detector (112). The first magnetic detector (111) and the second magnetic detector (112) respectively have magnetic sensors which are paired. One magnetic sensor MS1 of the first magnetic detector, which has a vertical magnetic field detection direction, is disposed at a height h from the transport surface, and one magnetic sensor MS2 of the second magnetic detector is disposed at a distance d from the magnetic sensor MS1.
Owner:CANON DENSHI KK

Jp2006234470

The present invention provides a color blur inspection method and the apparatus thereof, which could inspect the existence and level of color blur in high precision without the influence by personal difference and status difference of individual. The present invention could eliminate the Mohr's stripes, adjust the focus of focusing optical system 34, employ a video camera device 35 to capture the substrate 31, and inspect the existence and level of color blur according to the photo data.
Owner:TORAY ENG CO LTD

Preload inspection method and assembly method for wheel bearing device

Provided is a preload inspection method for a wheel bearing device enabling more accurate checking of preload. The invention comprises: a press-fitting step (S02) for press-fitting an inner ring (4) to a small-diameter stepped part (3a); a first bearing preload value calculation step (S03) for calculating a first bearing preload value (P1) on the basis of a first axial direction negative clearance (G1); a first rotating torque measurement step (S05) for measuring a first rotating torque Ta after the press-fitting step; a swaging step (S06) for swaging the small-diameter stepped part to the inner ring after the first rotating torque measurement step; a second bearing preload value calculation step (S07) for calculating a second bearing preload value (P2) on the basis of a second axial direction negative clearance (G2); a second rotating torque measurement step (S08) for measuring a second rotating torque Tb after the swaging step; a third bearing preload value calculation step (S09) for calculating a third bearing preload value (P3) by adding, to the first bearing preload value, a preload change amount (Delta P) based on a differential torque (Delta T) between the first rotating torque and the second rotating torque; and a determination step (S10) for determining the suitability of the preload from the second bearing preload value and the third bearing preload value.
Owner:NTN CORP
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