Glass substrate defect inspection device and glass substrate defect inspection method

Abstract

A glass substrate defect inspecting device and an inspection method thereof are provided to reduce or remove bouncing phenomenon and steadily perform an inspection by reducing the corrected amount during the inspection. A glass substrate (100) comprises a lifting device, a transfer device, and an optical inspection device. The lifting device lifts up a glass substrate(P) using air. The transfer device transfers the glass substrate to an inspection area where the lifting device is absent. The optical inspection device takes a picture of the glass substrate, thereby performing an inspection. A glass substrate defect inspecting device comprises a reduction device. The reduction device reduces the displacement caused by the bouncing of an end part of the glass substrate toward a transferring direction.

Description

technical field [0001] The present invention relates to a glass substrate defect inspection device and a glass substrate defect inspection method, and relates to a glass substrate defect inspection device and a glass substrate defect inspection method capable of inspecting with high precision. Background technique [0002] A liquid crystal display panel or a solar cell panel is manufactured by forming a pattern on a glass substrate using a photolithography technique or the like. At this time, if there are defects such as damage or foreign matter on the surface of the glass substrate, it will not be possible to form a pattern satisfactorily, which will cause a defective product. Therefore, conventionally, defect inspections of glass substrate surface damage, foreign matter, and the like have been performed using defect inspection apparatuses. [0003] In order to carry out defect inspection, it is necessary to convey and inspect a glass substrate to a defect inspection appar...

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Problems solved by technology

[0004] The above-mentioned method of transporting glass substrates by air levitation has the following problems: due to the inertia during transport, the front end of the glass substrate jumps, etc., thereby losing the flatness in the transport direction, and the inspection accuracy is not high.

[0005] Although Patent Document 1 discloses that glass substrates are transported and processed after stopping, the above-mentioned problems when inspections are performed during transport are not recognized, and solutions to the problems are not disclosed.

In addition, although an optical inspection device is disclosed in Patent Document 2, the above-mentioned problem of inspection during transportation is not recognized, and no solution is disclosed.

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