The invention belongs to the technical field of optical
precision testing, and relates to a dual-
wavelength phase-shift interference method based on a partial compensation method and an implementationdevice. The method comprises the steps of building a partial compensation method dual-
wavelength phase-shift interferometer, and acquiring measured
wavefront wrapped phases of two single wavelengths;modeling a partial compensation method dual-
wavelength ideal interferometer, and acquiring residual wavefronts and wrapped phases of the two single wavelengths; eliminating known and unknown
wavefront variations in the measured
wavefront wrapped phases by adopting an
error separation and
elimination algorithm, and finally optimizing and reconstructing surface-shape error of the measured asphericsurface by adopting reverse iteration. The device comprises a first
laser, a second
laser, a first slit, a second slit, a first
plane mirror, a second
plane mirror, a first
beam splitter, a second
beam splitter, a
beam expander, a collimating mirror, a
standard plane mirror, a phase shifter, a partial compensating mirror, a measured aspheric surface, an
imaging lens and an interferogram acquisition
assembly containing a
sparse array sensor. The method and device provided by the invention are particularly applicable to
processing quality measurement for gradient aspheric surfaces with a small surface-shape error, molded aspheric surfaces with a great surface-shape error and free curved surfaces.