105results about "Correlation spectrometry" patented technology

Encoded spatio-spectral information processing is performed using a system having a radiation source, wavelength dispersion device and two-dimensional switching array, such as digital micro-mirror array (DMA). In one aspect, spectral components from a sample are dispersed in space and modulated separately by the switching array, each element of which may operate according to a predetermined encoding pattern. The encoded spectral components can then be detected and analyzed. In a different aspect, the switching array can be used to provide a controllable radiation source for illuminating a sample with radiation patterns that have predetermined characteristics and separately encoded components. Various applications are disclosed.

A spectrometer recognizes a measurement target on the basis of the spectral data set of observed light detected by a spectral sensor capable of measuring wavelength information and light intensity information. The spectrometer is provided with a spectral data processor. Spectral data sets are detected at two different positions by the spectral sensor, and the processor subtracts a first spectral data set from a second spectral data set, or divides the first spectral data set by the second spectral data set to calculate one phase correlation spectral data set, which is correlated to the spectral data sets at the two different positions. The processor simultaneously identifies the measurement target corresponding to the two different positions on the basis of the correlation spectral data set.

An apparatus and method for measuring Raman-type spectra using optical dispersion to convert an optical spectrum into a waveform which can be detected directly in the time domain without the use of a conventional spectrometer. In the example of stimulated Raman spectroscopy, the apparatus and method exposes a sample to a chirped, pulsed probe beam and a Raman pump beam and the resulting Raman spectra is detected by an optical detector in the time domain, and analyzed. Alternatively, the Raman spectra from the probe and pump beams is chirped with a dispersive element prior to detection and analysis. Each probe pulse provides a snapshot of the Raman spectrum that is sampled in time so that neither repetitive waveforms nor static samples are required. Therefore, high speed acquisitions and high throughput assays can be conducted. To facilitate detection, these spectral signals can also be amplified using distributed Raman amplification directly in the dispersive element.

Preferred embodiments of the invention provide for methods and systems of 2D spectroscopy using ultrafast, first light and second light beams and a CCD array detector. A cylindrically-focused second light beam interrogates a target that is optically interactive with a frequency-dispersed excitation (first light) pulse, whereupon the second light beam is frequency-dispersed at right angle orientation to its line of focus, so that the horizontal dimension encodes the spatial location of the second light pulse and the first light frequency, while the vertical dimension encodes the second light frequency. Differential spectra of the first and second light pulses result in a 2D frequency-frequency surface equivalent to double-resonance spectroscopy. Because the first light frequency is spatially encoded in the sample, an entire surface can be acquired in a single interaction of the first and second light pulses.

A correlation interferometric spectroscopy devices are described that detect the spectral characteristics of a sample wherein device consists of an electromagnetic radiation source for exciting a sample with photons; and a detector adapted to detect an arrival time of a photon at the detector and further adapted to detect a delay between the arrival time of different photons. The device may further consist of an autocorrelator adapted to analyze the between the arrival of photons at the detector. The device may also be used together with other spectral detection and characterizing systems, such as Raman spectroscopy and attenuated total reflectance spectroscopy. Also provided herein are methods, systems, and kits incorporating the correlation interferometric spectroscopy device.

The present invention is directed to an apparatus, method and software product for enhancing the dynamic range of a CCD sensor without substantially increasing the noise. Initially, the area of a N×M pixel CCD sensor array is subdivided into two regions, a large region having (M−a) pixels in each column for outputting large-amplitude signals with low noise and a smaller region having a pixels in each column for outputting small-amplitude signals with improved dynamic range. At integration time, the CCD is read out one region's rows at a time into the horizontal shift registers by shifting the pixel charges in either a or M−a vertical shifts. The charges in the horizontal shift registers are then shifted out of the horizontal shift registers in N horizontal shifts. Next, the remaining pixels in the region of the CCD are read out into the horizontal shift registers by shifting the pixel charges in the other of a or M−a vertical shifts. Those charges are then shifted out of the horizontal shift registers in N horizontal shifts. In a spectrographic application, the data from the two regions is read out in the form of a large-amplitude channel from the larger region's rows and a small-amplitude channel from the smaller region's rows.

An apparatus and method for detection of a feature etch completion within an etching reactor. The method includes determining a correlation matrix by recording first measured data regarding a first etch process over successive time intervals to form a first recorded data matrix, assembling a first endpoint signal matrix using target endpoint data for a specific etch process, performing a partial least squares analysis on the recorded data matrix and the first endpoint signal matrix to refine the recorded data matrix, and computing a correlation matrix based upon the refined recorded data matrix and the first endpoint signal matrix. The method further includes performing a second etch process to form a second recorded data matrix. The correlation matrix and the second recorded data matrix are analyzed to determine whether an endpoint of the second etch process has been achieved.