The invention discloses a surface and subsurface integrated
confocal microscopic
measurement device and a surface and subsurface integrated
confocal microscopic measurement method. The surface and subsurface integrated
confocal microscopic measurement comprises an annular light illumination module, an annular
light scanning module, a reflective confocal detection module and a dark field confocal detection module, wherein the annular light illumination module comprises a
laser, a
beam expander, a polarizing film I, a polarizing
beam splitting film, a quarter-wave plate, a conical lens and a
plane mirror; the annular
light scanning module comprises a transflective film I, a two-dimensional scanning
galvanometer, a scanning lens, a tube lens, an objective lens and a to-be-detected sample; thereflective confocal detection module comprises a transflective film II, a polarizing film II, a focusing lens I, a pinhole I and a camera I; and the dark field confocal detection module comprises a diaphragm, a polarizing film III, a focusing lens II, a pinhole II and a camera II. By means of illumination
beam shaping and complementary aperture shielding detection, the surface and subsurface integrated confocal microscopic
measurement device effectively separates a sample
surface reflection signal and a
subsurface scattering signal, can obtain three-dimensional distribution information of defects such as nanoscale surface scratches, abrasion, subsurface cracks and bubbles at the same time, and has a surface and subsurface defect integrated detection function.