Surface and subsurface integrated confocal microscopic measurement device and method

Abstract

The invention discloses a surface and subsurface integrated confocal microscopic measurement device and method. The device comprises an annular light illumination scanning module, a dark field confocal detection module and a reflection confocal detection module, wherein the annular light illumination scanning module comprises a laser, a beam expanding lens, a first polaroid, a first diffraction type flat plate conical lens, a second diffraction type flat plate conical lens, a beam splitting prism, an objective lens and a three-dimensional displacement table; the reflection confocal detection module comprises a reflector with a light through hole, a polarizing film I, a focusing lens I, a pinhole I and a camera I; and the dark field confocal detection module comprises a polarizing film II, a focusing lens II, a pinhole II and a camera II. Through illumination beam shaping and complementary aperture shielding detection, a sample surface reflection signal and a subsurface scattering signal are effectively separated, three-dimensional distribution information of defects such as nanoscale surface scratches, abrasion, subsurface cracks and bubbles can be obtained at the same time, and the surface and subsurface defect integrated detection function is achieved.

Description

technical field [0001] The invention relates to the technical field of optical precision measurement, and more specifically relates to a surface and subsurface integrated confocal microscopic measurement device and method. Background technique [0002] High-performance optical components and micro-electromechanical components are the core components of modern high-end equipment. In order to ensure their processing quality and service reliability, it is necessary to perform surface topography measurement and sub-surface defect detection on them. [0003] The existing non-destructive measurement technology of surface topography at home and abroad mainly includes: confocal microscopic measurement technology, white light interference microscopic measurement technology and zoom microscopic measurement technology. Compared with the other two techniques, the confocal microscopic measurement technology has the characteristics of wide applicability of measuring samples and the abilit...

AI Technical Summary

Problems solved by technology

Its ubiquitous shortcomings are low depth positioning accuracy, low signal-to-noise ratio, low detection efficiency, and limited detection samples.

And at present, there is no equipment at home and abroad that can realize the two functions of surface topography measurement and subsurface defect detection at the same time.

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