The invention discloses a rotary objective table for a multi-
station precise operation, and a control method. The rotary objective table consists of three parts: a fixed mechanism, a moving mechanismand a carrying plane. A piezoelectric stack is taken as a driver, and the stepping rotation is achieved through the bionic inchworm-like movement principles. The fixed mechanism comprises an upper layer and a lower layer, which are connected through a rectangular flexible hinge. Three groups of drive units are uniformly distributed on an external
diameter of the lower layer. The moving mechanism comprises an upper layer and a lower layer, and the upper and lower
layers are respectively in clearance fit with the upper and lower
layers of the fixed mechanism in an
assembly process. Each layer ofthe moving mechanism is designed to have a clamping unit which takes a bridge-type micro-displacement amplifying mechanism as the main body. After the driving through the piezoelectric stack, the size of the
diameter of a moving part is increased, and the clearance fit between the moving mechanism and the fixed mechanism is converted into
interference fit for achieving the clamping. In order to achieve the bionic inchworm-like movement principles, a strict
time sequence control signal is designed, and the compensation for a
control signal is carried out according to the nonlinearity of the drive unit. Therefore, the rotary objective table is compact in structure, is quick in response, is high in positioning precision, and is large in
stroke.