The invention relates to a
linear motor direct drive two-dimensional micro-vibration platform, in particular to a fixed
voice coil motor direct drive type X-Y micro-vibration platform. The fixed
voice coil motor direct drive type X-Y micro-vibration platform comprises a base,
voice coil linear motors, an X-direction motion platform, a Y-direction motion platform, a decoupling component, a gratingruler and the like, wherein the voice coil linear motors directly drive the X-Y two-dimensional micro-vibration platform; both the X-direction and Y-direction voice coil linear motors are fixed on the base, and the X-direction and X-direction motions are realized by the decoupling component; and the
grating ruler is used for detecting the position of the motors. In order to increase the motion speed and enhance the
motion accuracy, the invention eliminates the traditional rotating motor transmission mechanism and adopts the
linear motor to direct drive; in order to reduce the motion
inertia, the invention designs the decoupling component, and both the X-direction and Y-direction linear motors are fixed to realize the X-Y two-dimensional motion; and in order to realize high-accuracy high-stability motion, the invention uses the
grating ruler as the feedback element. The invention has the advantages of high speed,
high acceleration, high accuracy and high stability, and can be used in the fields of high-speed
automation equipments, electronic and
semiconductor processing equipments,
laser processing equipments and the like.