Fixed voice coil motor direct drive type X-Y micro-vibration platform

Abstract

The invention relates to a linear motor direct drive two-dimensional micro-vibration platform, in particular to a fixed voice coil motor direct drive type X-Y micro-vibration platform. The fixed voice coil motor direct drive type X-Y micro-vibration platform comprises a base, voice coil linear motors, an X-direction motion platform, a Y-direction motion platform, a decoupling component, a gratingruler and the like, wherein the voice coil linear motors directly drive the X-Y two-dimensional micro-vibration platform; both the X-direction and Y-direction voice coil linear motors are fixed on the base, and the X-direction and X-direction motions are realized by the decoupling component; and the grating ruler is used for detecting the position of the motors. In order to increase the motion speed and enhance the motion accuracy, the invention eliminates the traditional rotating motor transmission mechanism and adopts the linear motor to direct drive; in order to reduce the motion inertia, the invention designs the decoupling component, and both the X-direction and Y-direction linear motors are fixed to realize the X-Y two-dimensional motion; and in order to realize high-accuracy high-stability motion, the invention uses the grating ruler as the feedback element. The invention has the advantages of high speed, high acceleration, high accuracy and high stability, and can be used in the fields of high-speed automation equipments, electronic and semiconductor processing equipments, laser processing equipments and the like.

Description

technical field [0001] The invention relates to a fixed voice coil motor direct-drive X-Y micro-motion platform. The micro-motion platform has the characteristics of decoupling of moving parts, which makes its fast response, accurate positioning and high reliability performance more superior than the general linkage X-Y micro-motion platform, and can be applied to electronic and semiconductor processing equipment and laser processing equipment and its high-speed Automatic processing equipment and other fields. technical background [0002] In recent years, with the rapid development of advanced manufacturing technologies such as precision manufacturing technology, microelectronics technology and numerical control technology, the demand for high speed and high precision has become increasingly urgent, which has become the main trend of the current advanced manufacturing technology development. Taking the X-Y two-dimensional micro-motion platform as an example, most of the li...

AI Technical Summary

Problems solved by technology

On the other hand, in the common linked X-Y two-dimensional motor drive platform, one (dimension) motor is usually stationary, and the other (dimension) motor moves with the motion platform, which will undoubtedly increase the cost of the X-Y two-dimensional motor drive platform. Moment of inertia affects performance such as high speed, high precision and high stability

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