The present invention provides a
light irradiation apparatus for an
exposure apparatus capable of restraining
electric power consumption corresponding to necessary
luminous intensity and capable of performing simple control to the
light source part, its lighting control method,
exposure apparatus and substrate. The
optical control part 76 has a plurality of lighting mode groups with different numbers of illumined
light source part 73, and each lighting mode group respectively has a plurality of lighting
modes A1 to D1, A2 to D3, A3 to D3 lighted up by the
light source part 73 in point symmetric mode. Furthermore, the
optical control part 76 controls that a preset number of light source parts 73 are lighted up at
point symmetry mode according to identical lighting mode, therefore all light source parts 73 are lighted up in
point symmetry mode.