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155results about How to "Increase channel length" patented technology

Method for fabricating recess gate in semiconductor device

A method for fabricating a recess gate in a semiconductor device includes etching a silicon substrate to form a trench that defines an active region, forming a device isolation layer that gap-fills the trench, forming a hard mask layer over the silicon substrate, the hard mask layer comprising a stack of an oxide layer and an amorphous carbon layer, wherein the hard mask layer exposes a channel target region of the active region, and forming a recess region with a dual profile by first etching and second etching the channel target region using the hard mask layer as an etch barrier, wherein the second etching is performed after removing the amorphous carbon layer.
Owner:SK HYNIX INC

Fin FET and method of fabricating same

ActiveUS20050173759A1Improving swing characteristicReducing electric fieldTransistorSolid-state devicesInsulation layerSilicon
A fin field effect transistor (fin FET) is formed using a bulk silicon substrate and sufficiently guarantees a top channel length formed under a gate, by forming a recess having a predetermined depth in a fin active region and then by forming the gate in an upper part of the recess. A device isolation film is formed to define a non-active region and a fin active region in a predetermined region of the substrate. In a portion of the device isolation film a first recess is formed, and in a portion of the fin active region a second recess having a depth shallower than the first recess is formed. A gate insulation layer is formed within the second recess, and a gate is formed in an upper part of the second recess. A source / drain region is formed in the fin active region of both sides of a gate electrode.
Owner:SAMSUNG ELECTRONICS CO LTD

Fabrication of a high density long channel dram gate with or without a grooved gate

The present invention lengthens gate conductors used in memory chips to limit leakage current, while still allowing the overall size of cells to remain the same. The channel length for each gate is increased by decreasing the size of spaces between gates. Decreases in space size occurs by using photolithographic image enhancement techniques. These techniques allow the space between gate conductors to be smaller while the gate size increases. In addition, a groove may be added that additionally lengthens the effective channel length and provides an additional electrical shield to limit leakage current. These techniques lead to the same density memory cells for a given process with less leakage. Finally, if grooved gate structures are used, having a longer gate conductor allows a three sigma process to be used, which increases yields.
Owner:IBM CORP

Method and architecture for improving defect detectability, coupling area, and flexibility of nvsram cells and arrays

Several preferred embodiments of 1S1F 16T NVSRAM, 1S1F 20T NVSRAM, 1S2F 22T NVSRAM, 1S2F 14T NVSRAM cells are proposed, regardless of 1-poly, 2-poly, PMOS or NOS flash cell structures. Two separate sourcelines for the paired flash Strings are also proposed for easy adding ability for the NVSRAM circuit to detect the marginally erased Vt0 and marginally programmed Vt1 of the paired flash cell. By increasing an resistance added to common SRAM power line, the pull-down current through flash Strings to grounding source line can be made much larger than the pull-up current to improve SFwrite program operation. Simple method by increasing flash cell channel length to effectively enhance coupling area is applied to secure SRAM-to-Flash store operation under self-boost-program-inhibit scheme. 1S2F architecture also provide flexibility for alternate erasing and programming during both a recall and store operation.
Owner:APLUS FLASH TECH

Fin FET and method of fabricating same

ActiveUS20070176245A1Improving swing characteristicReducing electric fieldTransistorSolid-state devicesInsulation layerSilicon
A fin field effect transistor (fin FET) is formed using a bulk silicon substrate and sufficiently guarantees a top channel length formed under a gate, by forming a recess having a predetermined depth in a fin active region and then by forming the gate in an upper part of the recess. A device isolation film is formed to define a non-active region and a fin active region in a predetermined region of the substrate. In a portion of the device isolation film a first recess is formed, and in a portion of the fin active region a second recess having a depth shallower than the first recess is formed. A gate insulation layer is formed within the second recess, and a gate is formed in an upper part of the second recess. A source / drain region is formed in the fin active region of both sides of a gate electrode.
Owner:SAMSUNG ELECTRONICS CO LTD

Method for fabricating semiconductor device with vertical channel transistor

A method for fabricating a semiconductor memory device with a vertical channel transistor includes forming a plurality of pillars each having a hard mask pattern thereon over a substrate, each of the plurality of pillars comprising an upper pillar and a lower pillar; forming a surround type gate electrode surrounding the lower pillar; forming an insulation layer filling a space between the pillars; forming a preliminary trench by primarily etching the insulation layer using a mask pattern for a word line until a portion of the upper pillar is exposed; forming a buffer layer over a resultant structure including the preliminary trench except on a bottom of the preliminary trench; and forming a trench for a word line by secondarily etching the insulation layer until the surround type gate electrode is exposed.
Owner:SK HYNIX INC

Split gate flash memory and manufacturing method thereof

ActiveUS20060208307A1Longer channel lengthIncrease level of integrationTransistorSolid-state devicesElectrical and Electronics engineeringIsolation layer
A split gate flash memory is provided. Trenches are formed in the substrate to define active layers. The device isolation layers are formed in the trenches. The surface of the device isolation layers is lower than the surface of the active layers. The stacked gate structures each including a tunneling dielectric layer, a floating gate and a cap layer are formed on the active layers. The inter-gate dielectric layers are formed on the sidewalls of the stacked gate structures. The select gates are formed on one side of the stacked gate structure and across the active layer. The select gate dielectric layers are formed between the select gates and the active layers. The source regions are formed in the active layers on the other side of the stacked gate structures. The drain regions are formed in the active layers on one side of the select gates.
Owner:POWERCHIP SEMICON MFG CORP

Thin film semiconductor device and organic light-emitting display device

A thin film semiconductor device including a thin film transistor (TFT) that maintains a constant electrical characteristic and an organic light-emitting display device. The thin film semiconductor device includes: a substrate; and a thin film transistor (TFT) disposed on the substrate and comprising a semiconductor layer comprising a source region and a drain region, wherein a part of the source region is spaced apart from the drain region and partially surrounds the drain region, and wherein a part of the drain region is spaced apart from the source region and partially surrounds the source region.
Owner:SAMSUNG DISPLAY CO LTD
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