Ion surface etching method for diamond-like coating before preparing

Abstract

The invention belongs to the field of diamond-like coatings and particularly relates to an ion surface etching method for a diamond-like coating before preparing. The treatment method includes material polishing, vacuum pumping and heating, substrate cleaning and surface etching treatment, wherein two high-purity twin titanium targets are adopted as the target material, an intermediate-frequency magnetron sputtering method is adopted, cooperation of the pulse negative bias is adopted, high-energy titanium ions are adopted for conducting bombarding on the surface of a base body, an etching effect is generated, and the effect of modifying the surface of the base body is achieved. The diamond-like coating is prepared on the base body treated through the method so that good bonding strength and friction performance can be obtained, the coating and base body bonding force is 25.10 N, the friction coefficients of contact friction with silicon nitride and a titanium alloy are 0.14 and 0.12 respectively, and the wear rates are 8.32 E-12 mm<3> / Nm and 1.93 E-11 mm<3> / Nm respectively. The method is adopted as the pretreatment technology for preparing the diamond-like coating, the bonding strength of the coating can be improved, the technology is advanced, production is easy, and promotional value is achieved.

Description

technical field [0001] The invention belongs to the field of diamond-like coatings, in particular to an ion surface etching method before the preparation of diamond-like coatings. Background technique [0002] Diamond-like carbon (DLC) coating technology is an emerging technology developed in response to market demand in recent decades, and it is one of the important ways to improve the comprehensive performance of materials and parts. Using DLC ​​coating technology to modify the surface of materials and parts can effectively improve surface hardness, wear resistance, impact toughness and bending strength, thereby improving the service life of parts. Coating technology is widely used in mechanical processing, friction parts and other fields due to its remarkable effect, good adaptability and fast response. However, DLC coating technology is restricted by its own characteristics, such as poor bonding strength of the film base, large internal stress, poor toughness, unstable ...

AI Technical Summary

Problems solved by technology

Sand blasting roughens the surface of the cemented carbide, enhances the mechanical "lock effect" between the film base, increases the frictional resistance between the substrate and the coating, and thus improves the bonding force of the film base; the disadvantages of sand blasting Due to the large damage to the surface of the substrate, the surface roughness will be greatly increased, and the friction coefficient of the rough surface will be significantly increased, which cannot reflect the low friction coefficient and good wear resistance of the DLC coating.

[0005] In the existing transition layer technology, the improvement of the performance of DLC coating by a single transition layer is not enough to meet the needs of the application, and the reproducibility of the preparation of the composite transition layer is very poor

The surface pretreatment technology will cause obvious damage to the surface of the substrate and reduce the friction performance of the DLC coating; some surface pretreatment technologies also require additional equipment, and the coating preparation process cannot be formed at one time, which will introduce a large number of error factors

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