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Construction of oxygen ion conductor electrolyte film and its pulse magnetic controlled sputtering prepn. method

A technology for oxygen ion conductors and electrolyte membranes, applied in solid electrolyte fuel cells, cable/conductor manufacturing, conductors, etc., can solve the problems of low film quality, high applicable temperature, and low electronic conductivity and ion conductivity

Inactive Publication Date: 2005-01-12
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The object of the present invention is to provide a kind of YSZ and RCO electrolyte and make multi-layer composite nano film structure A / (B / A) n (A, B represent YSZ or RCO, n≥1) method to solve the problems of high applicable temperature, low electronic conductivity, low ionic conductivity and low film quality in the current research of YSZ and RCO electrolytes

Method used

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Experimental program
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Effect test

specific Embodiment approach

[0017] step 1

[0018] Selection and installation of target and substrate: Install YSZ and RCO ceramic targets on two target holders at the bottom of the pulse magnetron sputtering coating chamber respectively, with a distance of 120 degrees between the two targets; single crystal silicon, MgO and 1 The ~3mm thick Ni-YSZ or Ni-RCO fuel cell anode plate is used as the substrate, installed in the upper center of the coating chamber, and the vertical distance from the target is 30-80mm.

[0019] step 2

[0020] Vacuuming and substrate heating: first start the mechanical pump, and after 15 to 40 minutes, when the air pressure in the coating chamber is less than 30Pa, turn on the solenoid valve and molecular pump in turn, turn off the side pumping valve, and open the gate valve; 40 to 70 Minutes later, when the air pressure reaches ~10 -3 Pa, start the heating power supply, slowly adjust the current from small to large (I max =11.5A), increase the heating rate. The back vacuum ...

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Abstract

The invention includes following structures and steps: using YSZ and RCO ceramics target as well as using monocrystalline silicon MgO and Ni-YSZ or Ni-RCO anode plate as substrate, distance between target and substrate as 30-80mm; vacuum degree 1X10-4-1X10-5 Pa, substrate temperature 300 deg.C-800 deg.C; ratio of gas pressure between oxygen and argon as 5%-40%; Thickness of each film is 10-200 nano, and number of layer is larger than or equal to three, the invention also contains other technical parameters. Multiple layers of nano film provides advantages of raising conductivity of oxyanion 10%-50%, optimizing fuel cell performance. The disclosed sputtering technique has features of fast, and high quality.

Description

technical field [0001] The invention belongs to the technical field of functional new materials, and relates to the structure of a class of multi-layer composite nanometer oxygen ion conductor electrolyte film material and its preparation methods. Background technique [0002] Oxygen ion conductor solid electrolyte is a kind of object that exhibits oxygen ion conductivity in solid state. In recent years, it has been widely used in energy storage and conversion, environmental protection and other fields, such as fuel cells, gas sensors, oxygen pumps, etc. Solid oxide fuel cell (SOFC) is one of the main application fields of this kind of electrolyte material. Due to the advantages of high energy conversion efficiency and low environmental pollution, SOFC has attracted widespread attention at home and abroad, and medium and low temperature (≤800°C) SOFC is currently a research hotspot in the field of fuel cells. As one of the key materials of fuel cells, electrolyte largely de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01B1/00H01B13/00H01M8/1253
CPCY02E60/521Y02E60/50
Inventor 姜雪宁张庆瑜陈充林
Owner DALIAN UNIV OF TECH
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