Strength and toughness integrated fullerene-like carbon-nitrogen multilayer composite film and preparation method thereof

Abstract

The invention relates to a strength and toughness integrated fullerene-like carbon-nitrogen multilayer composite film and a preparation method thereof and belongs to the technical field of surface engineering. The film structure comprises a metal matrix, a soft-hard alternate transition layer and a fullerene-like carbon-nitrogen layer in sequence, wherein the soft-hard alternate transition layer repeatedly alternates by taking one layer of Ti film and one layer of TiN film as one cycle; one layer of Ti film is arranged on the metal matrix; one layer of TiN film is arranged below the fullerene-like carbon-nitrogen layer. The film has the advantages of high hardness, high toughness, high binding force, good deformation capability of the film and the matrix and excellent wear resistance, thereby improving the binding force of a film matrix and wear resistance of the matrix as well as prolonging the life of the matrix. According to the preparation method disclosed by the invention, the soft-hard alternate transition layer is prepared by a direct current pulse magnetron sputtering method; internal stress is reduced and crack propagation is stopped; the method is simple and easy to control.

Description

technical field [0001] The invention relates to a strong and tough integrated fullerene-like carbon-nitrogen multilayer composite film and a preparation method thereof, belonging to the technical field of surface engineering. Background technique [0002] Fullerene-like carbon-nitride (FL-CNx) films have high hardness, high elastic restitution coefficient, good toughness and excellent tribological properties, and have broad application prospects in space mobile parts. However, the preparation of fullerene-like films with high hardness and high elastic modulus tends to cause peeling failure of the film on metal substrates with relatively low hardness and elastic modulus. A large number of research results at home and abroad show that the important reason for the failure of the film is the large residual stress and the poor bonding force between the film and the substrate, which leads to the peeling off of the film and the substrate. Therefore, it is an urgent problem to prep...

AI Technical Summary

Problems solved by technology

However, the preparation of fullerene-like films with high hardness and high elastic modulus tends to cause peeling failure of the film on metal substrates with relatively low hardness and elastic modulus.

A large number of research results at home and abroad show that the important reason for the failure of the film is the large residual stress and the poor bonding force between the film and the substrate, which leads to the peeling of the film and the substrate.