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Absorption radiation boron-doped diamond compound film and method for producing the same

A boron-doped diamond, radiation absorbing technology, applied in the fields of thermal radiation absorption and heat exchange membranes and their preparation, can solve the problems of unstable glow, falling off growth layer, etc., so as to improve the measurement accuracy and sensitivity, and shorten the measurement period , the effect of strong adhesion

Inactive Publication Date: 2008-08-20
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, due to the chemical vapor deposition method used at present, only diamond sheets of the same purity can be prepared, that is, only high-purity diamond sheets or black boron-doped diamond films, and it is difficult to perform composite growth at the same time, because if the growth conditions are in the growth process Changes in , can cause glow instability or shedding of different growth layers

Method used

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  • Absorption radiation boron-doped diamond compound film and method for producing the same

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Embodiment 1

[0022] The preparation method of the radiation-absorbing boron-doped diamond composite film of the present invention comprises the following steps:

[0023] (1) A pure diamond sheet was prepared as a heat sink material by chemical vapor deposition.

[0024] The heat sink diamond sheet is prepared by MW-PCVD microwave plasma chemical vapor deposition system, which belongs to the electrodeless discharge method, and high-quality high-purity transparent diamond film can be obtained under relatively low pressure. Metal molybdenum plate was used as the substrate during deposition, and the substrate treatment method was to grind with diamond abrasive paste for 30 minutes, and then ultrasonically treat with acetone and alcohol for 10 minutes respectively. Both hydrogen and methane are controlled by mass flow meters, H 2 The flow rate is 200sccm, CH 4 The flow rate is 3sccm, the microwave power is 4.2KW, the deposition pressure is 11KPa, the substrate temperature is 850°C, and the gr...

Embodiment 2

[0035] Prepare the radiation-absorbing boron-doped diamond composite film in the same manner as in Example 1, the only difference being:

[0036] (1) The process condition of a chemical vapor deposition heat sink diamond sheet is: H 2 The flow rate is 200sccm, CH 4 The flow rate is 1sccm, the microwave power is 3.8KW, the deposition pressure is 17KPa, the substrate temperature is 950°C, and the growth rate is about 1μm / h. The obtained diamond diaphragm has a thermal conductivity of 18W / K cm and a resistivity of 10 15 Ω·cm.

[0037] (2) The process conditions of secondary chemical vapor deposition of black boron-doped diamond film are: the flow rate of hydrogen and methane is: H 2 =170 sccm, CH 4 =5sccm, the flow rate of trimethyl borate is 8sccm; the temperature in the deposition chamber is 780°C; the gas pressure in the deposition chamber is 125Torr; the applied bias voltage is 710V, the current is 8.3A, and the deposition time is 4 hours. The surface of the black boron-...

Embodiment 3

[0039] Prepare the radiation-absorbing boron-doped diamond composite film in the same manner as in Example 1, the only difference being:

[0040] (1) The process condition of a chemical vapor deposition heat sink diamond sheet is: H 2 The flow rate is 200sccm, CH 4 The flow rate is 2sccm, the microwave power is 4KW, the deposition pressure is 13KPa, the substrate temperature is 750°C, and the growth rate is about 2μm / h. The thermal conductivity of the prepared diamond sheet is 17W / K cm, and its resistivity is 10 14 Ω·cm.

[0041] (2) The process conditions of secondary chemical vapor deposition of black boron-doped diamond film are: the flow rate of hydrogen and methane is: H 2 =170 sccm, CH 4 =7sccm, the flow rate of trimethyl borate is 10sccm; the temperature in the deposition chamber is 850° C.; the gas pressure in the deposition chamber is 130 Torr; the bias voltage is 740V, the current is 8.7A, and the deposition time is 4 hours. The surface of the black boron-doped ...

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Abstract

The present invention relates to a heat exchange film which is used in the absolute bolometer and the preparing method thereof, especially to a radiation-absorbing boron-doping diamond composite film and the preparing method. The radiation-absorbing boron-doping diamond composite film of the invention is prepared by compounding the pure diamond piece layer which is taken as the heat sink material and the black boron-doping diamond film that is taken as the light radiation absorbing material. The preparing method is firstly preparing the heat sink diamond piece with a one-time chemical vapor deposition, and then preparing the black boron-doping diamond film on the diamond piece with a secondary chemical vapor deposition. The radiation-absorbing boron-doping diamond composite film of the invention has the advantages of strong heat and impact resistance, higher absorbing rate to the radiation and the rate is up to 99%, and stability for a long period; and the surface adhesions of the heat sink material and radiation-absorbing material are excellent. Thereby the measuring precision and sensitiveness of the bolometer can be increased and the measuring period can be shortened, and the adaptability of the absolute bolometer in the working condition of satellite is increased.

Description

technical field [0001] The invention relates to a heat radiation absorbing and heat exchanging diaphragm used in an absolute bolometer in the field of optical radiometric measurement and a preparation method thereof. Background technique [0002] In order to study the Earth's radiation budget and energy cycle and its impact on the global environment and climate change, precise measurement and long-term monitoring of solar irradiance are required. The instrument used to observe solar irradiance on satellites is the absolute bolometer. Black radiation-absorbing materials are required for efficient absorption of radiation on absolute bolometers that measure solar irradiance. Since the solar irradiance is measured on the ground, it will inevitably be disturbed by the atmosphere, clouds, etc., so the absolute bolometer is placed on a meteorological satellite for observation. This requires that the radiation-absorbing material and the heat sink material on the absolute bolometer...

Claims

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Application Information

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IPC IPC(8): G01J5/02
Inventor 梁中翥梁静秋王维彪方伟
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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