86results about "Ion diffusion discharge tubes" patented technology

A small-sized charged particle beam apparatus capable of maintaining high vacuum even during emission of an electron beam is provided. A nonevaporative getter pump is placed upstream of differential pumping of an electron optical system of the charged particle beam apparatus, and a minimum number of ion pumps are placed downstream, so that both the pumps are used in combination. Further, by mounting a detachable coil on an electron gun part, the inside of a column can be maintained under high vacuum with a degree of vacuum in the order of 10−8 Pa.

The present invention provides a use of an electro-sensitive movable fluid, that is, a micromotor, a linear motor, a micropump and a method of using the micropump, a microactuator, and an apparatus which these devices are applied to, and a method and an apparatus of controlling flow properties of a fluid.

A closed drift ion source which includes a channel having an open end, a closed end, and an input port for an ionizable gas. A first magnetic pole is disposed on the open end of the channel and extends therefrom in a first direction. A second magnetic pole disposed on the open end of the channel and extends therefrom in a second direction, where the first direction is opposite to the second direction. The distal ends of the first magnetic pole and the second magnetic pole define a gap comprising the opening in the first end. An anode is disposed within the channel. A primary magnetic field line is disposed between the first magnetic pole and the second magnetic pole, where that primary magnetic field line has a mirror field greater than 2.

The present invention provides a micro vacuum pump capable of enhancing the performance of exhausting rare gases as well as active gases thereby to ensure quality, good repeatability and stable getter action of the micro vacuum pump over a long time. The invention also provides an apparatus assembling the micro vacuum pump. The micro vacuum pump capable of maintaining a high degree of vacuum includes a first conductive substrate having many protrusions and mounting a second conductive substrate disposed with a predetermined interval provided with respect to the first conductive substrate so that it faces the protrusions. A gate electrode is disposed in the vicinity of the apexes of the protrusions on the first conductive substrate via an insulator layer, and is positioned to face the second conductive substrate. Relative to the first conductive substrate, a negative potential is supplied to the second conductive substrate, and, a same negative potential difference is also applied to the gate electrode relative to the cones.

To provide a small electron gun capable of keeping a high vacuum pressure used for an electron microscope and an electron-beam drawing apparatus. An electron gun constituted by a nonevaporative getter pump, a heater, a filament, and an electron-source positioning mechanism is provided with an opening for rough exhausting and its automatically opening / closing valve, and means for ionizing and decomposing an inert gas or a compound gas for the nonevaporative getter pump. It is possible to keep a high vacuum pressure of 10−10 Torr without requiring an ion pump by using a small electron gun having a height and a width of approximately 15 cm while emitting electrons from the electron gun.

An image display apparatus is provided with a vacuum chamber consisting of an electron source substrate and an image display substrate, and an ion pump which is attached to an electron-emitting substrate or the image display substrate and exhausts air from the vacuum chamber by the action of a magnet, wherein the magnet is attached and fixed to the substrate to which the ion pump has been attached. Thereby, the image display apparatus prevents the magnet from applying an excessive force to the ion pump by its weight, and acquires a stable structure without causing a vacuum leak.

The present invention is an electrically controlled gettered pump assembly to entrain and fully release hydrogen gas to regulate the pressure and buffer the ions in an ion trap mass spectrometer and other portable analytical instruments. In addition to the gettered pump assembly, the present invention also incorporates a microvalve between the different chambers to release and control the hydrogen content. Hydrogen gas regulates the pressure in mass spectrometers and also acts as a buffering gas to prevent the ions from escaping the trap.

An ion pump and a charged particle beam device each includes two opposite flat-plate cathodes, an anode with a cylindrical shape having openings that face the respective flat-plate cathodes, a voltage application unit configured to apply a potential higher than potentials of the flat-plate cathodes to the anode, a magnetic field application unit configured to apply a magnetic field along an axial direction of the cylindrical shape of the anode, and a cathode bar arranged within the anode. The surface of the cathode bar is formed with a material that forms a non-evaporative getter alloy film on the anode or the flat-plate cathodes.

Provided is an ultra-high vacuum forming device containing an ion pump having a compact size in the central axis direction. The ultra-high vacuum forming device (1) is provided with at least one ion pump (100). The ion pump (100) is provided with: a casing (110) having at least one opening (111, 112); a board-shaped electrode group (120) formed by means of a central opening (120a) being formed along a predetermined central axis (C) disposed within the casing (110), and a plurality of electrodes (121) being joined with spaces therebetween; a pair of board-shaped electrodes (131, 132) having a different polarity than that of the electrode group (120) and that are disposed at positions sandwiching both sides of the electrode group (120) within the casing (110); and a pair of board-shaped magnets (141, 142) disposed at positions sandwiching both sides of the pair of board-shaped electrodes (131, 132).

Provided is an image display apparatus, including: a vacuum container which includes an electron source and an anode electrode opposed to the electron source; and an ion pump arranged so as to communicate through the vacuum container, in which: an ion pump container is composed of a non-electroconductive material; and an electroconductive film is formed on an external surface of the vacuum container on a side on which the ion pump container is mounted or on an internal surface of the ion pump container. The image display apparatus achieves: a reduction in weight of the ion pump; an improvement in compatibility to the vacuum container; and the prevention of an adverse effect of discharge inside the ion pump on image display.

A miniature, low cost mass spectrometer capable of unit resolution over a mass range of 10 to 50 AMU. The mass spectrometer incorporates several features that enhance the performance of the design over comparable instruments. An efficient ion source enables relatively low power consumption without sacrificing measurement resolution. Variable geometry mechanical filters allow for variable resolution. An onboard ion pump removes the need for an external pumping source. A magnet and magnetic yoke produce magnetic field regions with different flux densities to run the ion pump and a magnetic sector mass analyzer. An onboard digital controller and power conversion circuit inside the vacuum chamber allows a large degree of flexibility over the operation of the mass spectrometer while eliminating the need for high-voltage electrical feedthroughs. The miniature mass spectrometer senses fractions of a percentage of inlet gas and returns mass spectra data to a computer.

Provided is an image display apparatus including: a vacuum container having an electron source enclosed therein for displaying an image; an ion pump communicating with the vacuum container for discharging air therefrom and decreasing pressure therein; and a resistor connected in series with the ion pump with respect to a power supply for driving the ion pump. Even if internal resistance of the ion pump undergoes order-of-magnitude changes according to its operating state, current consumption can be suppressed and the ion pump can be driven efficiently.

The invention describes an X-ray tube (100) comprising an ion manipulation arrangement (140) having at least one ion collector electrode (141). The ion collector electrode (141) is made at least partially from a getter material. The ion manipulation arrangement (140) is in particular beneficial for high-end X-ray-tubes including an electrical field-free region (131). The ion manipulation arrangement (140) produces an electrical field, which deflects ions (150). When impinging onto the getter electrode (141) the ions (150) are permanently collected and thus removed from the interior of an evacuated envelope of the X-ray tube (100). This avoids ion bombardment on an electron emitter (111) of the X-ray tube (100). Additionally the arcing rate caused by residual gas can be reduced significantly. A heating of the getter material may be realized with heating wires or by a defined bombardment of scattered electrons (322) onto the electrodes (341, 342) comprising the getter material.

In one embodiment, a miniaturized structure and associated method function as a mass spectrometer or analyzer and may, with modification, function as an ion generator. The miniaturized structure has a pair of generally planar parallel spaced electrodes which have projecting walls cooperating to define an ion generating chamber and an exit aperture. By controlling the electric field which is oriented perpendicular to an applied magnetic field, the ion beam may be separated into a plurality beams based upon mass to charge ratio with a predetermined mass to charge ratio emerging from the exit of the apparatus and when the apparatus is functioning as a mass spectrometer or analyzer impinges on an ion collector which responsively transmits information to a cooperating processor. Where it is desired to have it function as an ionizer the ion collector disposed adjacent the ion exit is eliminated.

A combined pumping system comprising a getter pump (120; 220) and an ion pump (130; 230) is described. The getter pump and the ion pump (120, 130; 220, 230) are mounted in series on a same flange (111; 211) and respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system.

An image display apparatus is provided with a vacuum chamber consisting of an electron source substrate and an image display substrate, and an ion pump which is attached to an electron-emitting substrate or the image display substrate and exhausts air from the vacuum chamber by the action of a magnet, wherein the magnet is attached and fixed to the substrate to which the ion pump has been attached. Thereby, the image display apparatus prevents the magnet from applying an excessive force to the ion pump by its weight, and acquires a stable structure without causing a vacuum leak.

To provide a small electron gun capable of keeping a high vacuum pressure used for an electron microscope and an electron-beam drawing apparatus. An electron gun constituted by a nonevaporative getter pump, a heater, a filament, and an electron-source positioning mechanism is provided with an opening for rough exhausting and its automatically opening / closing valve, and means for ionizing and decomposing an inert gas or a compound gas for the nonevaporative getter pump. It is possible to keep a high vacuum pressure of 10−10 Torr without requiring an ion pump by using a small electron gun having a height and a width of approximately 15 cm while emitting electrons from the electron gun.

To provide a small electron gun capable of keeping a high vacuum pressure used for an electron microscope and an electron-beam drawing apparatus. An electron gun constituted by a nonevaporative getter pump, a heater, a filament, and an electron-source positioning mechanism is provided with an opening for rough exhausting and its automatically opening / closing valve, and means for ionizing and decomposing an inert gas or a compound gas for the nonevaporative getter pump. It is possible to keep a high vacuum pressure of 10−10 Torr without requiring an ion pump by using a small electron gun having a height and a width of approximately 15 cm while emitting electrons from the electron gun.

Provided is an image display apparatus including: a vacuum container having an electron source enclosed therein for displaying an image; an ion pump communicating with the vacuum container for discharging air therefrom and decreasing pressure therein; and a resistor connected in series with the ion pump with respect to a power supply for driving the ion pump. Even if internal resistance of the ion pump undergoes order-of-magnitude changes according to its operating state, current consumption can be suppressed and the ion pump can be driven efficiently.

A stand-alone plasma vacuum pump for pumping gas from a low-pressure inlet to a high-pressure outlet, composed of: a housing enclosing one or more pumping regions located between the inlet and the outlet; a plurality of permanent magnet assemblies providing magnetic fields that extend in the pumping region between the inlet and the outlet, the magnetic field forming magnetic flux channels for guiding and confining plasmas; elements disposed for coupling microwave power into the flux channels to heat electrons, ionize gas, and accelerate plasma ions in a direction from the inlet to the outlet; elements disposed for creating an electric in the magnetic flux channels to accelerate ions in the flux channels toward the outlet by momentum transfer; and a differential conductance baffle proximate to the outlet for promoting flow of plasma ions and neutral atoms to the outlet.

A sputter ion pump comprises a metal pump container. In the pump container are arranged a cathode and an anode opposed to each other in the pump container and a permanent magnet situated between the cathode and the inner surface of the pump container. After locating the anode, cathode, and magnetic material in the pump container, the magnetic material is magnetized from outside the pump container, thereby forming the permanent magnet.

The invention relates to an ionizing pump stage, in particular for a vacuum pump, comprising an inlet for gas entering into the pump stage; an ionizing section communicating with the inlet in a gas-conductive manner and an ionizing device for ionizing the gas entered into the ionizing section; an acceleration device for accelerating the ionized gas present in the ionizing section in the conveying direction; and a neutralizing section following the ionizing section in the conveying direction and communicating with the ionizing section in a gas-conductive manner and a neutralizing device for the electrical neutralizing of the ionized gas entering into the neutralizing section.

A miniature, low cost mass spectrometer capable of unit resolution over a mass range of 10 to 50 AMU. The mass spectrometer incorporates several features that enhance the performance of the design over comparable instruments. An efficient ion source enables relatively low power consumption without sacrificing measurement resolution. Variable geometry mechanical filters allow for variable resolution. An onboard ion pump removes the need for an external pumping source. A magnet and magnetic yoke produce magnetic field regions with different flux densities to run the ion pump and a magnetic sector mass analyzer. An onboard digital controller and power conversion circuit inside the vacuum chamber allows a large degree of flexibility over the operation of the mass spectrometer while eliminating the need for high-voltage electrical feedthroughs. The miniature mass spectrometer senses fractions of a percentage of inlet gas and returns mass spectra data to a computer.

A sputter ion pump includes one vacuum chamber, two parallel anode poles and one cold cathode electron emitter. The vacuum chamber includes at least one aperture located in an outer wall thereof. The two parallel anode poles are positioned in the vacuum chamber and arranged in a symmetrical configuration about a center axis of the vacuum chamber. The cold cathode electron emission device is located on or proximate the outer wall of the vacuum chamber and faces a corresponding aperture. The cold cathode electron emission device is thus configured for injecting electrons through the corresponding aperture and into the vacuum chamber. The sputter ion pump produces a saddle-shaped electrostatic field and is free of a magnetic field. The sputter ion pump has a simplified structure and a low power consumption.

The invention relates to the manufacturing technical field of a semiconductor, and specifically relates to a high-precision vacuum gauge tube. The high-precision vacuum gauge tube comprises a shell, athin film sheet, a fixed electrode, a first electrode column, a second electrode column and an air inlet, wherein the thin film sheet is fixedly arranged in the shell for dividing the internal spaceof the shell into a vacuum space and a tested space; the fixed electrode is fixedly arranged in the vacuum space; a main electrode is arranged on the surface, opposite to the thin film sheet, of the fixed electrode; a gold-plated layer is arranged on the other surface of the fixed electrode; one end of the first electrode column is connected with an external capacitance measurement circuit while the other end is connected with the shell; one end of the second electrode column is connected with the external capacitance measurement circuit while the other end passes through the shell to be connected with the gold-plated layer and insulated from the shell; and the air inlet is formed in the shell and positioned on one side of the tested space. The high-precision vacuum gauge tube is accuratein measurement and low in thermal drift coefficient and can be applicable to vacuum measurement in the semiconductor process equipment.

It is an object of the present invention to provide an ion pump system etc. having a high air-exhausting capacity and vacuum-maintaining capacity and capable of adjusting drive modes suitable for the uses thereof. The subject problem is solved by an ion pump system (7) comprising a casing (1), a first electrode group (2a,2b) provided in the casing (1), a second electrode group (3a,3b) provided on the outer periphery of the first electrode group (2a,2b), and outer magnets (4) for providing a magnetic field in the casing, wherein the first electrode group (2a,2b) and the second electrode group (3a,3b) are constituted as a plurality of layers alternately disposed around the center axis (11) of the casing (1).