The invention relates to a grinding wheel dicing saw, and particularly provides a device and a method for geometric accuracy measurement and error compensation of a dicing saw. The device comprises agrinding base, a moving platform, a cushion block, a supporting frame, a connecting arm, a lifting rod, a lifting fixed wheel, a front cantilever, a rear cantilever, a cantilever pressing wheel, a lifting guide column, a fixed guide sleeve, a horizontal connecting arm and an electronic micrometer. The precision of the base can be measured and verified, a clearer and more real error condition is displayed according to a measurement result, and local tiny errors are eliminated through manual grinding operation. And finally, a minimum error range is reached, and an error measurement structure isrecorded and ordered, and an actual error condition is simulated by using a nurbs curve principle, and the actual error condition is compensated by using software. Therefore, the highest reference precision is achieved, and the cutting requirement of the high-precision industry is met.