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Method for preparing zirconium oxide porcelain coating on self assembled functional organosilane single layer film

A technology for self-assembling single-layer, zirconia ceramics, which is applied to devices for coating liquids on surfaces, pretreatment surfaces, coatings, etc. simple effect

Inactive Publication Date: 2003-06-18
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for preparing zirconia ceramic film on the surface of functional organosilane self-assembled monolayer film, so as to solve the protection and lubrication problems of materials in micromachines

Method used

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Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment approach ： Embodiment 1

[0025] The specific implementation method: Example 1: the preparation of zirconia ceramic film on the surface of sulfonated MPTS self-assembled monolayer film, including two steps of A and B in turn:

[0026] A. Preparation of sulfonated MPTS self-assembled monolayer film:

[0027] (1) Use a single crystal silicon wafer as a substrate, wash it with a mixed solution (Piranha solution) of concentrated sulfuric acid and hydrogen peroxide with a volume ratio of 70%: 30% at 90 ° C, rinse with distilled water, and 2 air dry;

[0028] (2) Prepare 1×10 -3 Anhydrous toluene solution of M MPTS;

[0029] (3) Quickly immerse the cleaned monocrystalline silicon wafer in the prepared MPTS dilute solution and react at room temperature for 12 hours; after taking it out, wash it thoroughly with chloroform and deionized water and blow it dry with nitrogen gas to obtain MPTS monolayer film;

[0030] (4) The substrate on which the MPTS self-assembled monolayer film was prepared was then immer...

Embodiment 2

[0044] The friction and wear test was carried out on a dynamic and static friction coefficient tester of Japan Kyowa Co., Ltd. The experimental conditions are normal load 0.5, 1.0, 2.0, 3.0N, one-way sliding stroke 9mm, sliding speed 90mm min -1 , the friction coefficient is automatically recorded by the recorder. The wear life of the zirconia ceramic film is expressed by the number of sliding cycles when the film is worn through. When the coefficient of friction gradually increases and reaches a stable value, the film is considered to have worn through. The dual piece is made of φ3mmGCr15 steel ball. Measurements were performed at room temperature and relative humidity RH=40% to 45%. The results are shown in Table 1. Friction and wear test results show that the zirconia ceramic thin film involved in the present invention has good tribological properties under low load (0.5N), can be used as anti-friction, anti-wear protective coating, and is expected to be used as a micro...

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Abstract

A process for preparing the zirconium oxide ceramic film on the surface of functional self-assembled organic silane film includes such steps as preparing said self-assembled organic silane film containing S on the surface of monosilicon or glass chip, oxidizing the S-contained radicals on the surface of film to become sulfo radicals, and preparing zirconium oxide ceramic film in the aqueous solution by chemical adsorption. Its advantages are low cost, low poison, high density, and uniformly, large area, and high antiwear nature.

Description

Technical field: [0001] The invention relates to a method for preparing a zirconia ceramic film on the surface of a functional organosilane self-assembled monolayer film. Background technique: [0002] Zirconia ceramic film has excellent properties such as high temperature resistance, corrosion resistance, good chemical stability, high mechanical strength, low friction coefficient and long service life, etc. It can be used as a protective coating in harsh environments and in micro-electromechanical systems (simplified It is used as anti-friction or anti-wear material in micromachine (Micromachine) and magnetic recording system. Therefore, it has become one of the most widely studied ceramic materials in the field of functional materials and tribology in recent years. At present, the preparation techniques of zirconia ceramic thin films mainly include vapor phase deposition, sputtering deposition, plasma spraying and sol-gel method, etc. [0003] In the past two decades, se...

Claims

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Application Information

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IPC IPC(8): B05C3/02B05D1/18B05D1/36B05D3/10
Inventor 杨生荣王金清陈淼徐洮薛群基
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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