Polycrystalline black silicon texturization treatment fluid, polysilicon chip texturization method applying treatment fluid, and polycrystalline black silicon texturization product

Abstract

The invention provides a polycrystalline black silicon texturization treatment fluid. The polycrystalline black silicon texturization treatment fluid comprises a hydrofluoric acid solution, a hydrogen peroxide solution and a metal salt, wherein a volume ratio of the hydrofluoric acid solution to the hydrogen peroxide solution is 1-25:5-40, the mass fraction of hydrofluoric acid in the hydrofluoric acid solution is 40-50%, the mass fraction of hydrogen peroxide in the hydrogen peroxide solution is 20-55%, the metal salt is at least one of copper nitrate, silver nitrate, palladium nitrate, copper chloride, auric chloride acid, chloroplatinic acid, potassium chromate and nickel sulfate, and the mole concentration of the metal salt is 1-10<5>[mu]mol / L. The invention also provides a polysilicon chip texturization method applying the polycrystalline black silicon texturization treatment fluid, and a polycrystalline black silicon texturization product.

Description

technical field [0001] The invention relates to the field of texturing of crystalline silicon solar cells, in particular to the technical field of texturing of polycrystalline black silicon. Background technique [0002] In recent years, black silicon texturing technology has attracted widespread attention in the photovoltaic industry because it can achieve lower surface reflectivity in the full band, thereby increasing the short-circuit current of solar cells. There is an efficiency gap of about 1% between polycrystalline silicon solar cells and monocrystalline silicon solar cells. Among them, the high reflectivity of polycrystalline silicon after texturing is an important reason for this gap. It is an urgent need to use black silicon texturing technology to improve the efficiency of polycrystalline silicon solar cells. key issues to be resolved. [0003] There are dry and wet etching methods to realize polycrystalline black silicon texture. Among them, dry etching is main...

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Problems solved by technology

[0004] In the wet etching technology, the method of metal-catalyzed corrosion is more and more widely used. However, the surface area and uniformity of the polycrystalline black silicon textured surface prepared by the current black silicon textured method need to be improved, and Minority recombination is serious, and the process of texturing reaction is not easy to control

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