A MEMS (microelectromechanical
system) electrical switch device is provided for
circuit protection applications. The device includes a mechanical latching mechanism by which the switch is held in the closed position, and a mechanism by which this latch is released when the load current passing through the device reaches or exceeds some desired magnitude. In addition, a mechanism is provided by which the switch may be reset to its closed position by applying an
electrical control voltage to certain terminals of the device. A number of these devices, or arrays of these devices, can be fabricated by parallel processes on a single substrate, and
photolithography can be employed to define the mechanical structures described above. Other embodiments include additional
electrical isolation of the resetting mechanism, enhancement of the separation distance of the contact points of the switch in the open position, and prevention of arcing at the latch mechanism. A method of fabricating the device is provided. A method of using the aforementioned device is also provided.