The invention relates to an MEMS adjustable suspension
spiral inductor, and belongs to the technical field of a
microcomputer electric device and communication. An upper
electrode is arranged betweentwo segments of suspension spiral inductors, the distance between the upper
electrode and a lower
electrode is adjusted by controlling a driving
signal between the upper electrode and the lower electrode, the magnetic flow distribution is changed by changing transverse distance and longitudinal distance between
metal coils in a left-side suspension
spiral inductor and a right-side suspension
spiral inductor and by changing longitudinal distance between the two suspension spiral inductors and a
signal transmission line, an
inductance value is adjusted, and the required
inductance is obtained. With the adoption of the adjustable suspension spiral
inductor, the adjustable suspension spiral
inductor can be compatible with other MEMS devices for fabrication and is applied to the communication field of a tunable intelligent antenna. Compared with an adjustable
inductor, the adjustable suspension spiral inductor has the advantages that the structural area can be reduced, the parasitic effectis reduced, the process flow is simplified, and continuous and adjustable
inductance value is achieved.