MEMS adjustable suspension spiral inductor

Abstract

The invention relates to an MEMS adjustable suspension spiral inductor, and belongs to the technical field of a microcomputer electric device and communication. An upper electrode is arranged betweentwo segments of suspension spiral inductors, the distance between the upper electrode and a lower electrode is adjusted by controlling a driving signal between the upper electrode and the lower electrode, the magnetic flow distribution is changed by changing transverse distance and longitudinal distance between metal coils in a left-side suspension spiral inductor and a right-side suspension spiral inductor and by changing longitudinal distance between the two suspension spiral inductors and a signal transmission line, an inductance value is adjusted, and the required inductance is obtained. With the adoption of the adjustable suspension spiral inductor, the adjustable suspension spiral inductor can be compatible with other MEMS devices for fabrication and is applied to the communication field of a tunable intelligent antenna. Compared with an adjustable inductor, the adjustable suspension spiral inductor has the advantages that the structural area can be reduced, the parasitic effectis reduced, the process flow is simplified, and continuous and adjustable inductance value is achieved.

Description

technical field [0001] The invention relates to a MEMS adjustable suspended spiral inductor, which belongs to the technical field of microelectromechanical devices and communication. Background technique [0002] Inductors are the basic devices for filtering, tuning, amplification, impedance coupling and frequency coupling. On-chip integrated inductors with high quality factors can improve the performance of RF units such as RF filters, power amplifiers, low-noise amplifiers, phase-locked loops, and antennas, thereby improving the performance of communication systems and reducing the size of the system. Furthermore, in a communication system that supports multiple working frequency bands and multiple standards, the adjustable inductor can obtain different inductance values ​​by changing the structure, shape, length, etc. of the inductor according to the different operating frequencies required by the system. Other passive components such as resistors form an impedance match...

AI Technical Summary

Problems solved by technology

In 2008, in the article MEMS Switched Tunable Inductors, Mina Rais-Zadeh and others used MEMS switch arrays to gate different inductances to obtain different inductance values, but the structure was complex and the obtained inductance values ​​were discrete and discontinuous

In 2015, F.Khan et al. used the method of connecting the thermally driven structure in the MEMS-based tunable meander inductor to adjust the inductance by stretching the coil to change the coil spacing, but temperature control is required, which is difficult in practice application

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