Planar inductor using liquid metal mems technology

Abstract

Using MEMS device design and fabrication techniques, liquid metal inductors (100, 200, 300) can be formed. Because of the common fabrication techniques, liquid metal inductors can be more easily integrated with certain MEMS microswitches.

Description

technical field [0001] The present invention relates to planar inductors. Background technique [0002] With the introduction of micromachining techniques and microelectromechanical systems (MEMS) in the 1980s, many methods of mechanical actuation have been developed. Many different micromechanical switches (microswitches) have been developed using different actuation methods and design techniques. Many microswitch designs use solid-solid contact switches, which suffer from some of the same problems as larger size mechanical switches, such as wear on the switch contacts and signal bounce. Various configurations of liquid metal microswitches have been realized, and the differences between these configurations include: the mechanism used to actuate the switch (e.g., move a liquid metal droplet or "slug"), the device and technique for loading the switch with liquid metal, and the fabrication technology. Although great efforts have been made in the development of various micr...

AI Technical Summary

Problems solved by technology

Although great efforts have been made in the development of various microswitch technologies, little focus has been placed on the development of other circuit components for use with these devices

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