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Graphene sheet electron beam field emission cold cathode and production method thereof

A ribbon-shaped electron and graphene technology, applied in the direction of electron emission electrode/cathode, X-ray tube cold cathode, cold cathode, etc., can solve the problem of limited output power, high electric field strength of conductor sheets, and inability to stack and parallel several conductor sheets to improve output power and other issues, to achieve the effect of reducing operating voltage, easy industrial production, and fewer defects

Active Publication Date: 2016-11-09
SHENZHEN YICK XIN TECH DEV CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When a certain high voltage is applied to the cathode of this invention, due to the high electric field intensity at the front end of the conductor sheet, electrons are pulled out from the conductor sheet to form a strip-shaped electron beam, thereby realizing the emission of the strip-shaped electron beam; but this invention has a conductor sheet The thickness is relatively thick (on the order of millimeters), which can neither be used to manufacture flexible (bendable) electron beam field emission cold cathodes, nor can it be formed by stacking several conductor sheets in parallel to form several ribbon-shaped electron beams. Increase the output power, so its output power is also limited

Method used

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  • Graphene sheet electron beam field emission cold cathode and production method thereof
  • Graphene sheet electron beam field emission cold cathode and production method thereof
  • Graphene sheet electron beam field emission cold cathode and production method thereof

Examples

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Embodiment 1

[0029] In this example, two silicon oxides covered with Si surface are produced at one time. 2 SiO 2 / Si is used as the substrate, and a layer of graphene film is used as the emitter of the band-shaped electron injection field emission cold cathode as an example. The production method is as follows:

[0030] Step 1. SiO 2 After the / Si substrate is cleaned and dried, it is ready for use;

[0031] Step 2. The preparation of graphene thin film: at first place the copper foil of 25 μm thickness in the tube furnace that diameter is 5cm, length is 100cm, in H 2 Heating to 1030°C under a protective atmosphere and keeping the temperature constant for 1.5 hours, then injecting H 2 Quantity 1 / 50 of CH 4 , CH at 900°C 4 cleavage, CH 4 After pyrolysis, the copper foil is adsorbed on the surface of the metal foil to form a graphene film with a thickness of less than 1nm. After cooling in the furnace, it is cut into graphene / copper foil blocks with a length × width of 2.2 × 2cm for u...

Embodiment 2

[0037] In this embodiment, the band-shaped electron injection field emission cold cathode adopting three layers of graphene as the emitter is taken as an example, and the method is as follows:

[0038] Steps one, two, three and four are all the same as in Example 1;

[0039] Step 5.a. Use the magnetron sputtering coating process to coat a layer of SiO with a thickness of 30nm and an area of ​​about 1.79×2cm on the upper surface of the graphene facing the substrate in the single-layer emitter basic part obtained in step 4. 2 Layer is used as the insulating medium strengthening layer to obtain the cold cathode base part containing the substrate / electrode / graphene / insulating medium strengthening layer;

[0040] Step 6. The making of the multilayer emitter graphene band-shaped electron injection field emission cold cathode: sequentially on the basis of the cold cathode base part containing the substrate / electrode / graphene / insulating medium reinforcement layer obtained in step 5.a....

Embodiment 3

[0042] In this embodiment, the strip-shaped electron injection field emission cold cathode adopting a flexible insulating material as a substrate and a three-layer graphene emitter is taken as an example:

[0043] Step 1. Use a polyimide film as the substrate 1, and clean and dry the substrate before use;

[0044] All the other steps 2, 3, 4, 5 and 6 are the same as in Example 2; Figure 5 , Figure 6 That is, the structural schematic diagram of the cold cathode basic part obtained in step 5 of this embodiment and the structural schematic diagram of the strip-shaped electron injection field emission cold cathode using a flexible insulating material as the substrate and having a three-layer graphene emitter.

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Abstract

The invention belongs to a graphene sheet electron beam field emission cold cathode and a production method thereof. The cold cathode comprises a substrate, a metal film electrode on the substrate, graphene field emitters and insulated medium strengthening layers arranged between the graphene field emitters and the top layer. The production method comprises steps of processing of the substrate, preparation of a graphene thin film, setting of the metal film electrode, transferring of the graphene and making of a single-layer or multi-layer graphene sheet electron beam field emission cold cathode. The metal film electrode is set, the graphene is adopted as the emitter of the cold cathode, the emission end is made through cutting, extremely strong point effects are generated under an external applied electric field, and thus, the emission current can be improved, and the working voltage of the field emission cathode can be effectively reduced; and thus, the graphene sheet electron beam field emission cold cathode and the production method thereof have the advantages that the opening field and the threshold field of the sheet electron beam cold cathode can be effectively reduced, the emission current is large, the power is high, the electron beam emission stability is good, the size is small, the production process is simple, the production efficiency is high, consistency of device performance can be ensured, and industrialized production is facilitated.

Description

technical field [0001] The invention belongs to the field of microwave vacuum electronic components and its production technology, in particular to a graphene strip electron injection field emission cold cathode and a manufacturer of the cold cathode. Background technique [0002] As the electron emission source of vacuum electronic devices, the cathode of vacuum electronic devices is an important part of vacuum electronic devices. Most of the current vacuum electronic devices use hot cathodes, including pure metal cathodes, thoriated tungsten carbide cathodes, oxide cathodes, barium tungsten cathodes, etc. These hot cathodes have the advantages of high emission current density and stable performance, but the electrons in the solid of the hot cathode cannot escape from the solid without enough energy for excitation. Only heating can be used to increase the kinetic energy of the electrons inside the solid, so that the kinetic energy of the electrons is large enough to overco...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J1/304H01J19/24H01J35/06H01J9/02
CPCH01J1/304H01J9/025H01J19/24H01J35/065H01J2201/30461H01J2209/0223H01J2235/062
Inventor 柳建龙杨锦标曾葆青宋林川吴喆黎晓云傅文杰
Owner SHENZHEN YICK XIN TECH DEV CO LTD
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