Nano Ti/tin gradient film on titanium alloy surface and preparation method thereof

A gradient film and titanium alloy technology, applied in the field of materials, can solve the problems of high friction coefficient of TiN coating, easy cracking, corrosion resistance, etc., and achieve inhibition of crack formation and expansion, improvement of bonding force, high corrosion resistance and wear resistance Effect

Active Publication Date: 2017-03-22
NORTHEASTERN UNIV LIAONING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] In view of the above-mentioned deficiencies in the preparation method and performance of the existing titanium alloy surface coating, the present invention provides a nano-Ti / TiN gradient film on the surface of titanium alloy and its preparation method, using Ti6Al4V alloy as the base material, using magnetron sputtering Nano-Ti / TiN gradient film is deposited by technology to solve the problems of corrosion resistance and wear on the surface of medical titanium alloys, as well as the problems of high friction coefficient and easy cracking of conventional TiN coatings

Method used

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  • Nano Ti/tin gradient film on titanium alloy surface and preparation method thereof
  • Nano Ti/tin gradient film on titanium alloy surface and preparation method thereof
  • Nano Ti/tin gradient film on titanium alloy surface and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] Use Ti6Al4V alloy as the substrate, clean the surface of the substrate and place it in the vacuum chamber of the magnetron sputtering equipment, heat it to 400°C, and keep it warm for 10min under the condition of vacuum degree of 0.001Pa;

[0041] Introduce argon gas into the vacuum chamber and keep it flowing. The pressure of argon gas is 0.3Pa, and then perform ion bombardment on the substrate to clean the surface for 10 minutes;

[0042] Metal Ti is used as the target material, ion bombardment is carried out on the target material, and a Ti adhesion layer is deposited on the substrate for 5 minutes to obtain a substrate with a Ti adhesion layer;

[0043] Introduce nitrogen gas into the vacuum chamber and keep the nitrogen gas flowing, carry out ion bombardment on the target, and deposit TiN on the surface of the substrate with Ti adhesion layer. The process of depositing TiN is divided into 5 stages. During this process, the flow of argon gas remains constant. , the ...

Embodiment 2

[0049] Method is with embodiment 1, and difference is:

[0050] (1) Heat to 350°C, and keep it warm for 15 minutes in a vacuum chamber with a vacuum degree of 0.003Pa;

[0051] (2) The pressure of argon gas is 0.4Pa, and the time for cleaning the surface by ion bombardment is 8 minutes;

[0052] (3) The time for depositing the Ti adhesion layer is 10 minutes;

[0053] (4) The process of depositing TiN is divided into 6 levels. The flow ratios of nitrogen and argon in each level of deposition are 0.07, 0.10, 0.13, 0.16, 0.19 and 0.30, and the deposition times of each level are 4, 5, 6, 8, 17 and 60min; the total deposition time is 100min;

[0054] (5) The voltage during ion bombardment is 420V, and the current is 1.6A;

[0055] (6) The nano-Ti / TiN gradient film on the surface of the titanium alloy is divided into 6 layers, with a total thickness of 3.3 μm; a microhardness of 17GPa, and a bonding force of 80N;

[0056] The friction coefficient-slip time curve of the nano-Ti / ...

Embodiment 3

[0058] Method is with embodiment 1, and difference is:

[0059] (1) Heat to 320°C, and keep it warm for 20 minutes in a vacuum chamber with a vacuum degree of 0.005Pa;

[0060] (2) The pressure of argon gas is 0.5 Pa, and the time for cleaning the surface by ion bombardment is 6 minutes;

[0061] (3) The deposition time of Ti adhesion layer is 15min;

[0062] (4) The process of depositing TiN is divided into 8 levels. The flow ratios of nitrogen and argon in each level of deposition are 0.07, 0.09, 0.12, 0.14, 0.16, 0.18, 0.20 and 0.30, and the deposition times of each level are 3, 5, 7, 10, 15, 20, 30 and 60min; the total deposition time is 150min;

[0063] (5) The voltage during ion bombardment is 390V and the current is 1.4A;

[0064] (6) The nano-Ti / TiN gradient film on the surface of titanium alloy is divided into 8 layers, with a total thickness of 4.8μm; microhardness of 21GPa, and bonding force of 73N;

[0065] The friction coefficient-slip time curve of the nano-T...

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Abstract

A titanium alloy surface nano Ti / TiN gradient film and a preparation method thereof belong to the technical field of materials. The gradient film is a Ti-matrix TiN nano particle gradient film; TiN nano particles are embedded into a Ti-matrix film; the volume fraction of the TiN nano particles is increased along a gradient from a matrix to the film surface direction; and the total thickness of the TiN nano particles is 2.5-6.0 micrometers. The preparation method comprises the steps: (1) the matrix is heated and kept warm under a vacuum condition; (2) the argon pressure is 0.3-0.6 Pa, the surface is cleaned by carrying out ion bombardment; (3) a Ti adhesion layer is deposited on the matrix; and (4) nitrogen is introduced, TiN is deposited on the surface of the matrix with the Ti adhesion layer, the TiN deposition process is divided into 5-10 levels, the flow ratio of the nitrogen and argon is increased level by level, and the deposition time is prolonged level by level. The natural excellent lattice matching relation and the associativity exist between the product and the matrix; the surface is smooth; the compactness is high; the anti-wear performance is favorably improved; and the preparation process is simple and the operation is easy.

Description

technical field [0001] The invention belongs to the technical field of materials, in particular to a nano Ti / TiN gradient film on the surface of a titanium alloy and a preparation method thereof. Background technique [0002] Due to its low elastic modulus, good biocompatibility and applicable mechanical properties, titanium alloys are widely used in load-bearing parts such as human spinal orthopedic fixers and artificial joints. However, the low wear resistance of titanium alloys makes the implants prone to wear during long-term use and produce abrasive particles, causing aseptic loosening, which seriously affects their safety and service life. TiN has excellent corrosion resistance, wear resistance and good biocompatibility, and has been designated by the US Food and Drug Administration as a surface coating material for cardiac, oral and orthopedic implants. As a human implant component, the TiN coating should not only have high hardness, wear resistance, impact toughness...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06B82Y30/00B82Y40/00
Inventor 崔文芳秦高悟曹栋
Owner NORTHEASTERN UNIV LIAONING
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