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Process for low temperature, dry etching, and dry planarization of copper

The subject invention pertains to a method and apparatus for etching copper (Cu). The subject invention can involve passing a halide gas over an area of Cu such that CuX, or CuX and CuX2, are formed, where X is the halide. Examples of halides which can be utilized with the subject matter include, but are not necessarily limited to, Cl, Br, F, and I. Once the CuX, or CuX and CuX2, are formed the subject invention can then involve passing a reducing gas over the area of Cu for a sufficient time to etch away at least a portion of the CuX, or CuX2, respectively. With respect to a specific embodiment in which CuX and CuX2 are produced when the halide gas is passed over the area of Cu, the reducing gas can be passed until essentially all of the CUX2 is etched and at least a portion of the CuX is etched. Examples of reducing gases which can be utilized with the subject invention include, but are not necessarily limited to, hydrogen gas and hydrogen gas plasma. The subject invention can accomplish the etching of Cu by passing the reducing gas over the Cu so as to be on a CuX2—Cu3X2 metastable line when etching CuX2 and to be a CuY—CuX metastable line, where Y is the reducing gas element, when etching CuX. FIGS. 5, 6, and 8, show such metastable lines for Cu, with X being Cl, from temperatures ranging from 50° C. to 200° C. These can be extrapolated to other temperatures, for other halides, and/or other reducing gases. The subject invention can be used to, for example, etch partial into a layer of Cu, through a layer of Cu, or to smooth a Cu surface.
Owner:KULKARNI NAGRAJ S

Method and device for driving a multiplicity of piles into a seabed

A plurality of piles is arranged in frame elements in an axially displaceable manner. Hammers are positioned on the piles. After driving of the piles into a seabed, the hammers are connected to the frame elements, wherein the frame elements together with the hammers are lifted to the surface of the water and to the seaborne vessel by a crane.
Owner:SIEMENS GAMESA RENEWABLE ENERGY AS

Method of producing a microwave filter

The invention relates to a method for producing a microwave filter (700), comprising making at least one through-cutout (750) in a first electrically conductive plate (740) shaped as a rectangle, with a short side and a long side, inserting the first plate (740) between a second (710) and a third (730) electrically conductive plate (710), the first plate being arranged parallel to the second and the third plate, making electrical connections (794, 795) between said three plates for interconnecting those edge surfaces on the plates which coincide with the direction of propagation of the electrical signals, as a result of which a space comprising one or more cavities is formed. The first plate (740) is arranged so that the extent of its short side coincides with the E-field of the microwave signals when they propagate in the filter (700), and the extent of its long side coincides with the direction of propagation of the electrical signals.
Owner:TELEFON AB LM ERICSSON (PUBL)

Device and process for manufacturing a component formed of a plurality of moldings made of plastic and welded together

For manufacturing a component formed of a plurality of moldings, which are made of plastic, are welded together. A first molding is manufactured in a first mold that has a first mold part and is then transported with the first mold part into a welding station. Correspondingly, a second molding is manufactured in a second mold that has a second mold part and is transported with the second mold part into the welding station. The mold parts holding the moldings are moved towards one another in the welding station such that the moldings are welded together. Additional moldings are manufactured in the molds simultaneously with the welding of the moldings.
Owner:GEBR KRALLMANN GMBH +1

Method and System for the Use of Biomarkers for Regulatory Dysfunction in Disease

Measuring of the binding of a transcription factor (using, for example, chromatin immunoprecipitation) according to the present invention is provides an improved marker for a disease. These markers can be used in diagnostics for diseases where a transcription factor binding event plays a role. Additionally, they can be used to adjust disease risk profiles for healthy individuals as with typical genetic variants.
Owner:THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIV
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