64results about How to "Abbe's error is small" patented technology

The invention discloses a two-dimensional laser optical path gear measurement device. The device comprises a main motion shaft system, an optical path tracking and adjustment shaft system, and a laser interferometry system. The main motion shaft system comprises a rotary table and three linear motion shaft systems, moves along a measurement planning path, and executes various operations in the whole measurement process. Three linear motion shafts of the optical path tracking and adjustment shaft system make synchronous movement with the main motion shaft system, thereby guaranteeing that a laser optical path is not cut off and is in a collimation state. The laser interferometry system has X and Z two-dimensional laser wavelength measurement optical paths, is disposed nearby a gear tested point, and can directly measure a plurality of error items of a gear. The device is short in measurement chain, is high in measurement precision, is high in flexibility, and can meet the requirements of direct tracing measurement of gear errors.

The invention discloses a method and a device for measuring a free-form surface based on reference plane comparative measurement, and belongs to the technical field of optical precision detection. Themethod uses the high-precision plane flat crystal as a reference plane of an X-Y surface, utilizes the high-precision height measurement sensor and the free-form surface measurement sensor which arecoaxially installed to detect the high-precision plane flat crystal and the surface height information of the measured free-form surface respectively, utilizes the high-precision height measurement sensor to acquire the surface height information of the high-precision plane flat crystal to monitor and compensate the straightness error of an X-direction air-floatation guide rail and a Y-direction air-floatation guide rail, performs dimension reduction error separation on the surface appearance of the free-form surface, and realizes the nanometer precision detection of the appearance of the free-form surface. The method and the device for measuring the free-form surface based on reference plane comparative measurement can realize the detection of the free-form surface, provide high-precisionthree-dimensional linear positioning and scanning measurement, inhibit the influence of the straightness error of the movement of the X-direction guide rail and the Y-direction guide rail on the measurement of the free-form surface, reduce the influence of the Abbe error of the Z axis on the measurement, and realize the large-range and nanometer precision measurement of the free-form surface.

The invention provides a reset compensation type three-optical-axis linear displacement laser interferometer calibration method and a reset compensation type three-optical-axis linear displacement laser interferometer calibration device, and belongs to the laser measurement technology. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a three-axis hollow laser interference mirror group, and is parallelly arranged in the center position of three parallel standard measuring light beams distributed in a regular triangular prism side edge form, the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the air refractive index average value of the three standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated, three light beam position detectors respectively measure the derivative displacement of the three standard measuring light beams relative to a target reflecting mirror in a plane vertical to the standard measuring light beams in any two-dimensional directions, a micro inching device measures the derivative displacement average value according to the three light beam position detectors, the real-time reset compensation is carried out on the derivative displacement of the target reflecting mirror, and the incidence position of the measuring light beams on the reflecting surface of the target reflecting mirror is enabled not to be changed.

The invention discloses a cable-type displacement sensor calibration device and a calibration method. The cable-type displacement sensor calibration device includes a linear guide rail, a laser interferometer slide table, a spindle slide table and a spindle slide table slidably arranged on the linear guide rail in sequence. A pull-wire displacement sensor slide, the laser interferometer slide is provided with a laser interferometer, the spindle slide is provided with a spindle, and the pull-wire displacement sensor slide is provided with a calibrated pull-wire displacement sensor, The pull-wire displacement sensor calibration device includes a first induction wire calibration fine-tuning sleeve, a second induction wire calibration fine-tuning sleeve, an induction wire calibration fine-tuning plate and a handle for fixing the starting end of the induction wire of the pull-wire displacement sensor. Induction wire fixing element. The wire displacement sensor calibration device aims to solve the technical problems of inconvenient clamping, small measuring range, large Abbe error and poor safety caused by the calibration scheme of the wire displacement sensor in the prior art.

The invention discloses a vernier caliper capable of effectively reducing Abbe errors and a measuring method, which comprises a main ruler and a vernier ruler. The upper and lower ends of the front side of the vernier ruler are provided with flanges to form a main ruler accommodating groove, and the main ruler is arranged on the main ruler. The vernier scale is slidingly connected with the main scale in the scale accommodation groove, and pressure sensors are arranged symmetrically along the front and rear directions in the main scale accommodation grooves at the upper and lower ends. The pressure sensing device is used to collect the pressure signal generated by the main scale against the vernier scale. The signal output end of the pressure sensing device is connected to the signal input end of the processing module, and the signal output end of the processing module is connected to a display device; the processing module is used to receive the pressure signal input by the pressure sensing device, and perform signal processing on the pressure signal before calculating The differential pressure signal value used to represent the parallelism between the main line of the vernier scale and the main line of the main scale is obtained. The invention can solve the problems of large Abbe error and low measurement accuracy in the use process of the existing vernier caliper.