Method and device for calibrating return compensation type double-optical-axis angular displacement laser interferometer

Abstract

A method and a device for calibrating a return compensation type double-optical-axis angular displacement laser interferometer belong to the technical field of laser measurement. Two measurement light beams of the calibrated laser interferometer penetrate through a middle through hole of a double-axis hollow laser interferoscope group; the two measurement light beams of the calibrated laser interferometer are arranged in the middle positions of two parallel standard measurement light beams in parallel; the perpendicular distance between the standard measurement light beams and the measurement light beams of the calibrated laser interferometer is very small, and the air refractive index of the standard measurement light beams is extremely close to that of the measurement light beams of the calibrated laser interferometer; an average derived displacement is measured by a micro-motion device according to two light beam position detectors to carry out return compensation on the derived displacement of a target reflector in real time, so that the incidence positions of the measurement light beams on the reflecting surface of the target reflector do not vary.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique [0002] Angular displacement laser interferometer is a standard measurement technology with high precision. It is widely used in precision and ultra-precision machining, microelectronic equipment, nanotechnology industrial equipment and national defense equipment. It can be used for micro-displacement components, mobile platforms and lithography Monitoring of machine angle changes. The angular displacement laser interferometer can provide high measurement accuracy, and can dynamically measure the relative swing angle in motion, which is a unique advantage different from other instruments. In order to ensure the accuracy of the angular displacement laser interferometer measurement, the Calibration of the displacement laser interferometer is very important. The realization of the angular di...

AI Technical Summary

Problems solved by technology

[0003] In view of the large Abbe error, serious inconsistency of air refractive index and inaccurate calibration of two sets of laser interferometers in the existing angular displacement laser interferometer calibration device, the present invention proposes and develops a return compensation A method and device for calibrating a dual optical axis angular displacement laser interferometer. The invention makes the vertical distance between the standard measuring beam and the measuring beam of the calibrated laser interferometer very small, thereby reducing the Abbe error and reducing the influence of air refractive index inconsistency , and in the accurate sense two sets of laser interferometers are calibrated

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