A device and method for synchronously measuring guide rail line displacement and straightness in situ

Abstract

The invention discloses a device and a method for synchronously measuring the line displacement and straightness of a guide rail in situ. The integrated two-dimensional grating guide rail is to etch the two-dimensional grating on the upper surface of the linear guide rail, and the reading head is embedded in the slide block. The specific measurement method is as follows: when the slider moves on the guide rail, the reading head outputs two pairs of orthogonal sinusine and cosine signals at the same time, and after filtering and analog-to-digital conversion, it is transmitted to the host computer through the acquisition card, and the edge is counted by high-frequency pulses. Methods Calculate the displacement and straightness on the host computer; the linear displacement of the guide rail is obtained by the orthogonal signal generated by the grid line perpendicular to the x-axis, and the straightness of the guide rail is obtained by the orthogonal signal generated by the grid line perpendicular to the y-axis. The invention has the advantages of small installation volume of the guide rail pair, high positioning accuracy, multi-parameter synchronous on-site measurement, etc., and provides a new method for the displacement and straightness measurement of the guide rail.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and in particular relates to a device and method for synchronously measuring the linear displacement and straightness of a guide rail in situ. Background technique [0002] The continuous improvement of positioning accuracy is one of the "stuck neck" technical problems in the development of high-end equipment. Linear guide rail components are the core basic components of high-end equipment, and their precise guidance and positioning accuracy play a decisive role in the accuracy of high-end equipment. [0003] refer to figure 1 with figure 2 , the structural form of the traditional guide rail assembly is the assembly combination of the guide rail 6, the one-dimensional grating 7 and multiple external sensors. The uncertainty becomes larger; secondly, the two materials are inconsistent, and it is easy to introduce nonlinear errors under the condition of heating, which cannot be ef...

AI Technical Summary

Problems solved by technology

The traditional method is to install multiple sensors to detect the linear displacement and straightness of the guide rail separately. At present, there are mainly off-line detection methods such as the pitch method, the light gap method, the metering method, and the three-coordinate method to detect the straightness of the guide rail. Disadvantages such as large volume and offline measurement affect production speed and quality

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