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Glass-chip flowing minisize electrolyzer and manufacturing method

A mobile micro-electrolytic cell and micro-electrolytic cell technology, applied in cross fields, can solve the problems that the chip can only be used once, and the membrane electrode cannot be replaced, etc., and achieve the effect of close distance, flexible and convenient electrode configuration, and small voltage drop

Inactive Publication Date: 2007-03-28
NORTHEASTERN UNIV
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AI Technical Summary

Problems solved by technology

Membrane electrodes cannot be exchanged, so the associated chip is usually only one-time use

Method used

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  • Glass-chip flowing minisize electrolyzer and manufacturing method
  • Glass-chip flowing minisize electrolyzer and manufacturing method
  • Glass-chip flowing minisize electrolyzer and manufacturing method

Examples

Experimental program
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Embodiment Construction

[0031] The specific manufacturing steps of preparing the micro-electrolytic cell chip by photolithography based on laser phototypesetting machine printing mask and wet etching glass substrate are described in detail below.

[0032] 1. Use CoreDraw or similar software to design and generate mask graphics files for microchannels and electrode channels;

[0033] 2. Use a laser phototypesetter to print the graphics file on the polyester film to form a black and white mask;

[0034] 3. Use the UV exposure machine to transfer the mask pattern to the positive photoresist (AZ4650) surface on the chrome plate glass (Changsha Shaoguang, SG2506 type):

[0035] 4. Dip the exposed glass substrate in 0.5% NaOH solution for 40-60 seconds to expose the graphic structure;

[0036] 5. Transfer the chip to an oven at 110°C and bake for about 15 minutes to make the photoresist film firm;

[0037] 6. Soak in the chromium removal solution for about 2 minutes under gentle shaking to remove the exp...

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PUM

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Abstract

A glass chip mobile micro electrolytic cell includes the electrode, micro-electrolytic cell channel, solution channel, solution inlet and outlet, cover piece and substrate, electrode channel, electrode positioning ridge, electrode doors. On the substrate or on the substrate and the cover are synchronously etched with a micro electrolytic cell channel and electrode channel, the connection part of the two channels forms the electrode positioning ridge. Use glass lithography method and the heat integration to make chip usually. Electrodes are lead in from the side of the chip and positioned in the electrode channel. The volume of the micro mobile cell is Nano litre grade so the reagent consumption is low. The electrodes are separated without film because of lamina flow action of the channel. Advantages: dismounting and changing electrode is convenient, chip can be repeatedly used and electrode configuration is agility.

Description

technical field [0001] The invention belongs to the intersecting fields of micro-electromechanical systems (MEMS), electrochemistry, analysis and detection, and chemical synthesis, and relates to a flow micro-electrolytic cell chip and a preparation method thereof. Background technique [0002] Microfluidics (Microfluidics) chip technology is developed on the basis of microelectromechanical systems (MEMS) and microelectronic processing. It aims to integrate analysis systems to form micro-total analysis systems (Micro-TAS), so as to achieve system miniaturization. Improve system performance and save reagents. The electrochemical detection method has the greatest potential to form a miniature total analysis system because of its simplicity, sensitivity, and ease of integration. As an electrochemical detector for chip electrophoresis, it has been widely studied and applied. The electrochemiluminescence method has attracted much attention because of its high sensitivity, especi...

Claims

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Application Information

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IPC IPC(8): G01N27/28B81B7/02
Inventor 方芳吴志勇
Owner NORTHEASTERN UNIV
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