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A molybdenum-silver layered composite material, its preparation method and application

A technology of composite material and silver layer, which is applied in the direction of metal material coating process, coating, vacuum evaporation plating, etc., can solve the problems of natural environment and human health damage, interconnection sheet performance damage, and increased pollution control costs, etc. Achieve excellent anti-oxidation corrosion and thermal fatigue resistance, solve the effect of non-dense coating, good economic and social benefits

Active Publication Date: 2022-05-31
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the electroplating process needs to go through multiple high-temperature heat treatment processes, which is very cumbersome and complicated, and the strength is still insufficient.
Furthermore, the electroplated silver layer has its own defects. Usually, the electroplated coating has a columnar crystal structure with poor compactness, and there are vacancies and defects inside. In the low earth orbit environment, atomic oxygen can pass through these defects of the coating material. Entering into the interior to corrode it, such a long and slow atomic oxygen attack can still cause serious damage to the performance of the interconnect
In addition, the wastewater, waste gas and waste residue generated during the electroplating process will cause damage to the natural environment and human health, and also increase the cost of pollution control for enterprises

Method used

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  • A molybdenum-silver layered composite material, its preparation method and application
  • A molybdenum-silver layered composite material, its preparation method and application
  • A molybdenum-silver layered composite material, its preparation method and application

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preparation example Construction

[0029] As an aspect of the technical solution of the present invention, it relates to a preparation method of a molybdenum-silver layered composite material (also known as silver / metal intermediate layer / molybdenum layered composite material), which includes:

[0030] At least a molybdenum base material and a metal target having good solid solubility with molybdenum are placed in a vacuum environment, and a metal intermediate layer is deposited on the surface of the molybdenum base material by a DC magnetron sputtering method;

[0031] At least the molybdenum base material and the metallic silver target material with the metal intermediate layer formed on the surface are placed in a vacuum environment, and a silver layer is deposited on the surface of the metal intermediate layer by DC magnetron sputtering method; and

[0032] The obtained molybdenum base material-metal intermediate layer-silver layer composite structure is annealed, so that the metal elements constituting the ...

Embodiment 1

[0082] (1) Mo foil pretreatment

[0083] The molybdenum foil with a size of 50mm×50mm×0.02mm was sanded and immersed in a degreasing solution (NaOH:Na 2 CO 3 : Na 2 SiO 3 = 3:2:1 mixed solution) for degreasing. Rinse the Mo foil surface with plenty of deionized water after degreasing treatment. Then place the Mo foil in 10% H 2 SO 4 The solution was etched for 10 minutes, taken out and rinsed with deionized water, then placed in deionized water for ultrasonic cleaning for 20 minutes, and taken out to dry for use.

[0084] (2) Magnetron sputtering deposition of Cr intermediate layer

[0085] The Mo foil processed in step (1) is placed in a vacuum coating chamber. Using metal Cr with a purity of 99.99% as the target material and high-purity Ar as the working gas, pre-evacuated to 5×10 -3 Below Pa, after the plasma cleaning treatment for 30 minutes, the pulsed DC power supply of the Cr target was turned on, and the Cr intermediate layer was deposited on the surface of th...

Embodiment 2

[0097] In this embodiment, the substrate is exactly the same as the substrate in Example 1, and a Cr intermediate layer and an Ag layer are sequentially deposited on the surface of the substrate to prepare a Mo / Cr / Ag layered composite material. The preparation method is as follows:

[0098] (1) is identical with step (1) in embodiment 1;

[0099] (2) Magnetron sputtering deposition of Cr intermediate layer

[0100] The Mo foil processed in step (1) is placed in a vacuum coating chamber. Using metal Cr with a purity of 99.99% as the target material and high-purity Ar as the working gas, pre-evacuated to 5×10 -3 Below Pa, after the plasma cleaning treatment for 30 minutes, the pulsed DC power supply of the Cr target was turned on, and the Cr intermediate layer was deposited on the surface of the Mo foil. The sputtering power of the Cr target was 500W, the bias voltage was -85V, the working pressure was 0.5Pa, and the deposition time was 10min. A Cr layer (hereinafter referred ...

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Abstract

The invention discloses a molybdenum-silver layered composite material, its preparation method and application. The preparation method comprises: at least placing a molybdenum base material and a metal target having good solid solubility with molybdenum into a vacuum environment, and depositing a metal intermediate layer on the surface of the molybdenum base material by DC magnetron sputtering; at least Putting the molybdenum substrate and the metal silver target material with the metal intermediate layer formed on the surface into a vacuum environment, and depositing a silver layer on the surface of the metal intermediate layer by DC magnetron sputtering; and the obtained molybdenum substrate ‑Metal interlayer‑silver layer composite structure is annealed, so that the metal elements constituting the metal interlayer continuously diffuse into the molybdenum substrate and the silver layer. The present invention can successfully prepare the silver / metal interlayer / molybdenum layered composite material, which is environmentally friendly, has high process stability, and can be produced on a large scale; and the obtained molybdenum-silver layered composite material has high density, excellent bonding strength, and excellent Anti-oxidation corrosion and thermal fatigue resistance.

Description

technical field [0001] The invention relates to a preparation method of a molybdenum-silver layered composite material, in particular to a silver thin film / metal intermediate layer / molybdenum composite material, a preparation method and application thereof, and belongs to the technical field of composite materials. Background technique [0002] The proton oxygen and thermal fatigue properties of space solar cell array interconnection sheet materials directly affect the high reliability, long life and safe operation of low orbit spacecraft solar cell arrays. Because molybdenum has excellent electrical conductivity, excellent heat resistance, high temperature mechanical properties, low thermal expansion coefficient and high thermal conductivity, it is a natural choice for thermal shock and thermal fatigue resistance. In addition, the reaction rate of molybdenum with atomic oxygen is almost zero, that is, molybdenum is not affected by the corrosion of atomic oxygen. Because of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/16C23C14/58H01L31/05
CPCC23C14/35C23C14/3485C23C14/345C23C14/165C23C14/5806H01L31/0512Y02E10/50
Inventor 姜欣赵大强张学东蒲吉斌王立平
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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